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12067-56-0

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12067-56-0 Structure

12067-56-0 Structure
IdentificationBack Directory
[Name]

TANTALUM SILICIDE
[CAS]

12067-56-0
[Synonyms]

Einecs 235-081-3
silicon,tantalum
TANTALUM SILICIDE
pentatantalum trisilicide
Nickel Chromium (Ni-Cr) Alloy Sputtering Targets
Tantalumsilicide,99.5%(metalsbasisexcludingNb),Nb0.1-1%
TANTALUM SILICIDE, 99.5% (METALS BASIS EXCLUDING NB), NB 0.1
[EINECS(EC#)]

235-081-3
[Molecular Formula]

Si3Ta5
[MDL Number]

MFCD00678396
[MOL File]

12067-56-0.mol
[Molecular Weight]

213.06
Chemical PropertiesBack Directory
[Melting point ]

2499 ℃
[density ]

13,060 (ρ/kg.m–3)
[Crystal Structure]

Hexagonal
[Stability:]

The compound is thermally stable in air up to 400°C
[EPA Substance Registry System]

Tantalum silicide (Ta5Si3) (12067-56-0)
Hazard InformationBack Directory
[Chemical Properties]

-325 mesh powder(s); used as a 99.5 or 99.95% material as a sputtering target in the fabrication of integrated circuits [ALF93] [CER91]
Safety DataBack Directory
[TSCA ]

Yes
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