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18166-43-3

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18166-43-3 Structure

18166-43-3 Structure
IdentificationBack Directory
[Name]

TRI-T-BUTOXYSILANOL
[CAS]

18166-43-3
[Synonyms]

NSC 243646
TRI-T-BUTOXYSILANOL
TRIS(T-BUTOXY)SILANOL
Tri-tert-butoxysilanol
Tri-tert-butyl silicate
TRIS(TERT-BUTOXY)SILANOL
Tri(tert-butyloxy)silanol
Tri-t-butoxysilanol (99.9+%-Si)
Tris(tert-butoxy)silanol 99.999%
Tri-tert-butyl hydrogen orthosilicate
Tri-t-butoxysilanol (99.999%-Si) PURATREM
Silicic acid, tris(1,1-diMethylethyl) ester
Tri-t-butoxysilanol (99.999%-Si) PURATREM 14-7015 contained in 50 Ml Swagelokcylinder (96-1077) for CVD/ALD
Tri-t-butoxysilanol (99.999%-Si) PURATREM 14-7015 contained in 50 ml Swagelok(R) cylinder (96-1077) for CVD/ALD
[Molecular Formula]

C12H28O4Si
[MDL Number]

MFCD00271024
[MOL File]

18166-43-3.mol
[Molecular Weight]

264.43
Chemical PropertiesBack Directory
[Melting point ]

63-65 °C(lit.)
[Boiling point ]

205-210 °C(lit.)
[density ]

0,92 g/cm3
[Fp ]

>65°C
[storage temp. ]

below 5° C
[form ]

solid
[pka]

11.78±0.53(Predicted)
[Hydrolytic Sensitivity]

7: reacts slowly with moisture/water
[Sensitive ]

moisture sensitive
[InChI]

1S/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3
[InChIKey]

HLDBBQREZCVBMA-UHFFFAOYSA-N
[SMILES]

CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C
Safety DataBack Directory
[Risk Statements ]

36/37/38
[Safety Statements ]

22-24/25
[WGK Germany ]

3
[TSCA ]

No
[Storage Class]

11 - Combustible Solids
Questions And AnswerBack Directory
[Uses]

Silicon oxide source for rapid atomic layer deposition to prepare various nanolaminates.
Spectrum DetailBack Directory
[Spectrum Detail]

TRI-T-BUTOXYSILANOL(18166-43-3)IR
Hazard InformationBack Directory
[General Description]

Tris(tert-butoxy)silanol can react with various metal alkyl amides to act as precursors for vapor deposition metal silicates. It also acts as a suitable precursor for deposition of silica.
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