Hexamethyldisilazane
- CAS No.
- 999-97-3
- Chemical Name:
- Hexamethyldisilazane
- Synonyms
- HMDS;BIS(TRIMETHYLSILYL)AMINE;1,1,1,3,3,3-HEXAMETHYLDISILAZANE;HEXAMETHYLDISILYLAMINE;HMDZ;hexamethylsilazane;((CH3)3Si)2NH;hexamethyldisilazane(hmds);1,1,1,3,3,3-Hexamithyl disilazane;1,1,1-Trimethyl-N-(trimethylsilyl)silanamine
- CBNumber:
- CB9105784
- Molecular Formula:
- C6H19NSi2
- Molecular Weight:
- 161.39
- MDL Number:
- MFCD00008259
- MOL File:
- 999-97-3.mol
- MSDS File:
- SDS
| Product description | Number | Pack Size | Price |
| Hexamethyldisilazane produced by Wacker Chemie AG, Burghausen, Germany, ≥97.0% (GC) | 86944 | 500G | $155 |
| Hexamethyldisilazane produced by Wacker Chemie AG, Burghausen, Germany, ≥97.0% (GC) | 86944 | 5KG | $758 |
| Hexamethyldisilazane produced by Wacker Chemie AG, Burghausen, Germany, ≥97.0% (GC) | 86944 | 20KG | $2640 |
| 1,1,1,3,3,3-Hexamethyldisilazane for synthesis | 8.04324 | 50mL | $40.7 |
| 1,1,1,3,3,3-Hexamethyldisilazane for synthesis | 8.04324 | 250ML | $114 |
| More product size | |||
| Melting point | -78 °C |
|---|---|
| Boiling point | 125 °C (lit.) |
| Density | 0.774 g/mL at 25 °C(lit.) |
| vapor density | 4.6 (vs air) |
| vapor pressure | 20 hPa (20 °C) |
| refractive index |
n |
| Flash point | 57.2 °F |
| storage temp. | Store below +30°C. |
| solubility | Miscible with acetone, benzene, ethyl ether, heptane and perchloroethylene. |
| pka | 30(at 25℃) |
| form | Liquid |
| color | Colorless |
| Specific Gravity | 0.774 |
| Odor | Ammonia odour |
| PH Range | 8.5 |
| Evaporation Rate | < 1 |
| Viscosity | 0.9mm2/s |
| explosive limit | 0.8-25.9%(V) |
| Water Solubility | REACTS |
| Sensitive | Moisture Sensitive |
| Hydrolytic Sensitivity | 7: reacts slowly with moisture/water |
| Merck | 14,4689 |
| BRN | 635752 |
| InChIKey | FFUAGWLWBBFQJT-UHFFFAOYSA-N |
| LogP | 0.23-1.19 at 20-25℃ |
| CAS DataBase Reference | 999-97-3(CAS DataBase Reference) |
| EWG's Food Scores | 1 |
| FDA UNII | H36C68P1BH |
| NIST Chemistry Reference | Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-(999-97-3) |
| EPA Substance Registry System | Hexamethyldisilazane (999-97-3) |
| UNSPSC Code | 12352103 |
| NACRES | NA.23 |
SAFETY
Risk and Safety Statements
| Symbol(GHS) |   GHS02,GHS06 |
|||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Signal word | Danger | |||||||||
| Hazard statements | H225-H302+H332-H311-H412 | |||||||||
| Precautionary statements | P210-P273-P280-P301+P312-P303+P361+P353-P304+P340+P312 | |||||||||
| Hazard Codes | F,C,Xn | |||||||||
| Risk Statements | 11-20/21/22-34-52/53 | |||||||||
| Safety Statements | 16-26-36/37/39-45-61 | |||||||||
| RIDADR | UN 3286 3/PG 2 | |||||||||
| WGK Germany | 2 | |||||||||
| RTECS | JM9230000 | |||||||||
| F | 21 | |||||||||
| Autoignition Temperature | 325 °C | |||||||||
| Hazard Note | Flammable | |||||||||
| TSCA | Yes | |||||||||
| HS Code | 2931 90 00 | |||||||||
| HazardClass | 3 | |||||||||
| PackingGroup | II | |||||||||
| Hazardous Substances Data | 999-97-3(Hazardous Substances Data) | |||||||||
| Toxicity | LDLO i.p. in mice: 650 mg/kg (Petrarch Systems Inc. Product Information Sheets) | |||||||||
| Limited Quantities | 1.0 L (0.3 gallon) (liquid) | |||||||||
| Excepted Quantities | Max Inner Pack (30g or 30ml) and Max Outer Pack (500g or 500ml) | |||||||||
| NFPA 704 |
|
Hexamethyldisilazane price More Price(58)
| Manufacturer | Product number | Product description | CAS number | Packaging | Price | Updated | Buy |
|---|---|---|---|---|---|---|---|
| Sigma-Aldrich | 86944 | Hexamethyldisilazane produced by Wacker Chemie AG, Burghausen, Germany, ≥97.0% (GC) | 999-97-3 | 500G | $155 | 2025-07-31 | Buy |
| Sigma-Aldrich | 86944 | Hexamethyldisilazane produced by Wacker Chemie AG, Burghausen, Germany, ≥97.0% (GC) | 999-97-3 | 5KG | $758 | 2025-07-31 | Buy |
| Sigma-Aldrich | 86944 | Hexamethyldisilazane produced by Wacker Chemie AG, Burghausen, Germany, ≥97.0% (GC) | 999-97-3 | 20KG | $2640 | 2025-07-31 | Buy |
| Sigma-Aldrich | 8.04324 | 1,1,1,3,3,3-Hexamethyldisilazane for synthesis | 999-97-3 | 50mL | $40.7 | 2025-07-31 | Buy |
| Sigma-Aldrich | 8.04324 | 1,1,1,3,3,3-Hexamethyldisilazane for synthesis | 999-97-3 | 250ML | $114 | 2025-07-31 | Buy |
Hexamethyldisilazane Chemical Properties,Uses,Production
Description
Hexamethyldisilazane is a bulk organo silicon compound, being a quite useful silanizing agent. It is a reagent for the preparation of trimethylsilyl derivatives. It can also be used to dehydrate cells of biomaterials for scanning electron microscopy (SEM). Moreover, it is an adhesion promoter for photoresist in photolithography, and is also useful in the pyrolysis-gas chromatography-mass spectrometry to enhance the detectability of compounds with polar functional groups.
Chemical Properties
Hexamethyldisilazane, also known as HMDS, is an important organosilicon compound, a colorless and transparent liquid. It is readily hydrolyzed and gives off NH3 to produce hexamethyldisilyl ether. In the presence of a catalyst, it reacts with alcohols or phenols to produce trimethylalkoxysilane or trimethylaroxysilane. Reacts with anhydrous hydrogen chloride, releasing NH3 or NH4Cl, to produce trimethylchlorosilane.
Physical properties
Colorless transparent and easy flowing liquid. Boiling point 125℃, relative density 0.76 (20/4℃). Soluble in organic solvents, it will be rapidly hydrolyzed in contact with air to form trimethylsilanol and hexamethyldisilyl ether.
Uses
Hexamethyldisilazane mainly used as methyl silane alkylation (such as amikacin, penicillin, cephalosporins and kinds of penicillin derivatives), hydroxyl protectants of antibiotics. It is used as surface treatment agent of diatomite, white carbon black, titanium and blond additives of photoresist in the semiconductor industry. It is used as treatment agent of tearing strength resistance. It is used as a solvent in organic synthesis and organometallic chemistry. It is used as an adhesion promoter for photoresist in photolithography. it is used for the preparation of trimethylsilyl ethers from hydroxy compounds. It is used as an alternative to critical point drying during sample preparation in electron microscopy. It is added to analyte to get silylated diagnostic products during pyrolysis in gas chromatography- mass spectrometry.
Definition
ChEBI: Hexamethyldisilazane is an N-silyl compound obtained from ammonia by replacement of two of the hydrogens with trimethylsilyl groups. Hexamethyldisilazane is a derivatisation agent used in gas chromatography mass spectrometry applications. It has a role as a chromatographic reagent. It derives from a hydride of an ammonia.
Reactions
Hexamethyldisilazane(HMDS) is an extremely versatile and strong silylating agent. It is primarily used for the protection of sensitive functional groups during chemical synthesis.One of the advantages of Hexamethyldisilazane over chlorosilanes is that no base is needed as a hydrochloric acid acceptor. It produces ammonia which escapes easily from the reaction mixture during silylation.
General Description
Hexamethyldisilazane appears as a liquid. May be toxic by ingestion. Irritates skin and eyes. Vapors are heavier than air. May emit highly toxic nitrogen oxide fumes when heated to decomposition. Used to deactivate chromatography support materials and to promote adhesion of photoresists in the electronics industry.
Air & Water Reactions
Highly flammable. Moisture sensitive.
Reactivity Profile
Hexamethyldisilazane reacts with many carbonyl containing organic compounds to generate gaseous ammonia. May be incompatible with isocyanates, halogenated organics, peroxides, phenols (acidic), epoxides, anhydrides, and acid halides. Flammable gaseous hydrogen may be generated in combination with strong reducing agents, such as hydrides.
Hazard
Flammable, moderate fire risk.
Health Hazard
Inhalation or contact with material may irritate or burn skin and eyes. Fire may produce irritating, corrosive and/or toxic gases. Vapors may cause dizziness or suffocation. Runoff from fire control or dilution water may cause pollution.
reaction suitability
reagent type: derivatization reagent
reaction type: Silylations
Synthesis
A production method for hexamethyldisilazane comprises the following steps: trimethylsilyl chloride is added into a sealed reaction kettle with a bearing pressure higher than 0.5MPa, stirring is carried out, ammonia gas is introduced, the ammonia pressure in the reaction kettle is maintained at a value between 0.1MPa and 0.2MPa, the temperature is between 40 ℃ and 50 ℃, the reaction is carried out, and the ammonia gas quantity is gradually reduced till the stop; and then, the pressure is maintained at the unchanged value between 0.1MPa and 0.2MPa, the reaction is maintained for 0.5h to 2h, then, the temperature in the kettle is lowered to a value below 10 ℃, water with the temperature lower than 10 ℃ is added, the dissolution reaction is carried out to generate ammonia chloride, and upper layer materials are hexamethyldisilazane after the delamination.
Purification Methods
A possible impurity is Me3SiCl. Wash it well with pet ether and fractionate it through a vacuum jacketed column packed with Helipac using a reflux ratio of 10:1. [Langer et al. J Org Chem 23 50 1958, Beilstein 4 IV 4014.]
Toxics Screening Level
The ITSL is 206 μg/m3, based on annual averaging time.
References
Deng, Xiang. "Hexamethyldisilazane." Synlett 2011.06(2011):881-882. Chiavari, G, D. Fabbri, and S. Prati. "Gas chromatographic-mass spectrometric analysis of products arising from pyrolysis of amino acids in the presence of hexamethyldisilazane." Journal of Chromatography A922.1–2(2001):235-241.
Nation, J. L. "A new method using hexamethyldisilazane for preparation of soft insect tissues for scanning electron microscopy." Stain Technology 58.6(1983):347-51.
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Hexamethyldisilazane Preparation Products And Raw materials
Raw materials
Preparation Products
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| Supplier | Tel | Country | ProdList | Advantage | |
|---|---|---|---|---|---|
| Wuhan Kemi-Works Chemical Co., Ltd. | +86-2785736489 +8618171418573 | sales@kemiworks.com | China | 780 | 58 |
| Hebei Chuanghai Biotechnology Co,.LTD | +86-13131129325 | sales1@chuanghaibio.com | China | 5251 | 58 |
| Iota silicone oil (Anhui) Co.,ltd. | +86-15255260163 | sales05@siliconeoil.net | China | 311 | 58 |
| Hebei Chuanghai Biotechnology Co., Ltd | +8615350571055 | Sibel@chuanghaibio.com | China | 8772 | 58 |
| Win-Win chemical CO., Limited | +86-0086-577-64498589 +86-15355981851 | sales@win-winchemical.com | China | 14360 | 58 |
| Sichuan Zhuoyu Yantang Technology Co., Ltd. | +8613288715578 | sales@sichuanzyyt.com | China | 12247 | 58 |
| Hebei Yanxi Chemical Co., Ltd. | +8618531123677 | faithe@yan-xi.com | China | 5853 | 58 |
| Henan Bao Enluo International TradeCo.，LTD | +86-17331933971 | deasea125996@gmail.com | China | 2472 | 58 |
| Capot Chemical Co.,Ltd. | +86-（0）57185586718; +8613336195806 | sales@capot.com | China | 29734 | 60 |
| Jiangxi New jiayi New Materials Co., Ltd. | 15988280056 | mina@xjysi.com | CHINA | 27 | 55 |
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View Lastest Price from Hexamethyldisilazane manufacturers
| Image | Update time | Product | Price | Min. Order | Purity | Supply Ability | Manufacturer | |
|---|---|---|---|---|---|---|---|---|
 |
2025-10-17 | Hexamethyldisilazane
999-97-3
|
US $0.00 / KG | 1KG | 98%min | 30tons/month | WUHAN FORTUNA CHEMICAL CO., LTD | |
 |
2025-10-17 | Hexamethyldisilazane
999-97-3
|
US $10.00 / KG | 1KG | 99% | 100 mt | Hebei Chuanghai Biotechnology Co., Ltd | |
 |
2025-10-16 | Hexamethyldisilazane
999-97-3
|
US $0.00 / Kg/Drum | 1KG | 99% | 2000mt/year | Jinan Finer Chemical Co., Ltd |
-
- Hexamethyldisilazane
999-97-3
- US $0.00 / KG
- 98%min
- WUHAN FORTUNA CHEMICAL CO., LTD
-
- Hexamethyldisilazane
999-97-3
- US $10.00 / KG
- 99%
- Hebei Chuanghai Biotechnology Co., Ltd
-
- Hexamethyldisilazane
999-97-3
- US $0.00 / Kg/Drum
- 99%
- Jinan Finer Chemical Co., Ltd
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