TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE

169896-41-7 Basic information More..

Product Name:	TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE
Synonyms:	(TERT-BUTYLIMINO)TRIS(DIETHYLAMINO)TANTALUM;TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE;TRIS(DIETHYLAMIDO)(TERT-BUTYLIMIDO)TANTALUM(V);TRIS(DIETHYLAMINO)(T-BUTYLIMINO)TANTALUM;TRIS(DIETHYLAMINO)-TERT-BUTYLAMIDO TANTALUM;TRIS(DIETHYLAMINO)(TERT-BUTYLIMINO)TANTALUM(V);tert-butyliminotantalum,diethylazanide;TRIS(DIETHYLAMIDO)(TERT-BUTYLIMIDO)TANT&
CAS:	169896-41-7
MF:	C16H39N4Ta
MW:	468.46
EINECS:	624-910-8
Mol File:	169896-41-7.mol

Use

Tantalum tris(diethylamido)-tert-butylimide is a useful precursor for the atomic layer deposition of tantalum oxide and tantalum nitride.

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