(Trimethyl)methylcyclopentadienylplatinum(IV)
| | 94442-22-5 Basic information More.. |
| Product Name: | (Trimethyl)methylcyclopentadienylplatinum(IV) | | Synonyms: | Methylcyclopentadienyl trimethyl platinum;Trimethyl(methylcyclopentadienyl)platinum(IV) packaged for use in deposition systems;(Trimethyl)methylcyclopentadienylplatinum(IV), 99%, 78-1350, contained in 50 ml Swagelok cylinder for CVD/ALD;(TriMethyl)MethylcyclopentadienylplatinuM(IV),98%;(η5-methylcyclopentadienyl)trimethylplatinum(IV);(TriMethyl)MethylcyclopentadienylplatinuM(IV), 99%, 78-1350, contained in 50 Ml Swagelokcylinder high teMperature valve (96-1071) for CVD/ALD;(TriMethyl)MethylcyclopentadienylplatinuM(IV), 99%, 78-1350, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD;MeCpPtMe3 | | CAS: | 94442-22-5 | | MF: | C9H9Pt | | MW: | 312.26 | | EINECS: | 629-612-1 | | Mol File: | 94442-22-5.mol |  |
Use
(Trimethyl)methylcyclopentadienylplatinum(IV) was used for the deposition of ultrathin metallic layers of platinum by electron beam induced deposition, atomic sputtering.These deposits find application in microelectronics, catalysis, photonics and chemical sensing.
Platinum complex((Trimethyl)methylcyclopentadienylplatinum(IV)) can be widely used in CVD and ALD applications due, in part, to its simplicity (only C,H and Pt), volatility and moderate decomposition temperatures.
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94442-22-5
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