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| | TETRAKIS(TRIMETHYLSILOXY)SILANE Basic information |
| Product Name: | TETRAKIS(TRIMETHYLSILOXY)SILANE | | Synonyms: | 1,1,1,5,5,5-hexamethyl-3,3-bis-(trimethylsilanyloxy)-trisiloxane;1,1,1,5,5,5-hexamethyl-3,3-bis(trimethylsiloxy)-Trisiloxane;1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]-trisiloxan;1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]-Trisiloxane;1,1,1,5,5,5-hexamethyl-3,3-bis-trimethylsilanyloxy-trisiloxane;1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]trisiloxane;Tetrakis-(trimethylsilyloxy)-silan;Trisiloxane,1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]- | | CAS: | 3555-47-3 | | MF: | C12H36O4Si5 | | MW: | 384.84 | | EINECS: | 222-613-4 | | Product Categories: | Organics;OthersOrganometallic Reagents;Organometallic Reagents;Organosilicon;Trialkoxysilanes | | Mol File: | 3555-47-3.mol |  |
| | TETRAKIS(TRIMETHYLSILOXY)SILANE Chemical Properties |
| Melting point | -60 °C | | Boiling point | 103-106 °C/2 mmHg (lit.) | | density | 0.87 g/mL at 25 °C (lit.) | | vapor pressure | 27.4hPa at 20℃ | | refractive index | n20/D 1.389(lit.) | | Fp | 169 °F | | storage temp. | Inert atmosphere,Room Temperature | | form | liquid | | color | Colorless to Almost colorless | | Specific Gravity | 0.868 | | Water Solubility | 150.7ng/L at 23℃ | | Hydrolytic Sensitivity | 4: no reaction with water under neutral conditions | | BRN | 1793898 | | Henry's Law Constant | 2.6×10-8 mol/(m3Pa) at 25℃, Ebert et al. (2023) | | InChI | 1S/C12H36O4Si5/c1-17(2,3)13-21(14-18(4,5)6,15-19(7,8)9)16-20(10,11)12/h1-12H3 | | InChIKey | VNRWTCZXQWOWIG-UHFFFAOYSA-N | | SMILES | C[Si](C)(C)O[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C | | LogP | 9 at 25℃ | | EPA Substance Registry System | Tetrakis(trimethylsiloxy)silane (3555-47-3) |
| Hazard Codes | Xi | | Risk Statements | 36/37/38 | | Safety Statements | 26-36 | | RIDADR | NA1993 | | WGK Germany | 3 | | TSCA | TSCA listed | | HazardClass | CBL | | HS Code | 29319090 | | Storage Class | 10 - Combustible liquids | | Hazard Classifications | Eye Irrit. 2
Skin Irrit. 2
STOT SE 3 |
| | TETRAKIS(TRIMETHYLSILOXY)SILANE Usage And Synthesis |
| Chemical Properties | Colorless liquid | | Uses | Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound used as a precursor to prepare nanostructured organosilicon polymer films by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. TTMS along with cyclohexane can also be used to synthesize low dielectric constant SiCOH films by PECVD method. | | Flammability and Explosibility | Not classified |
| | TETRAKIS(TRIMETHYLSILOXY)SILANE Preparation Products And Raw materials |
| Raw materials | 3-Ethoxy-1,1,1,5,5,5-hexamethyl-3-(trimethylsiloxy)trisiloxane-->HEXAKIS(TRIMETHYLSILOXY)DISILOXANE-->Tetrasiloxane, 1,1,1,7,7,7-hexamethyl-3-(1-methylethoxy)-3,5,5-tris[(trimethylsilyl)oxy]--->3-Isopropoxy-1,1,1,5,5,5-hexamethyl-3-(trimethylsiloxy)trisiloxane-->bis(trimethylsilyl) diethyl silicate-->trimethylsiloxytriethoxysilane-->TETRABENZYLOXYSILANE-->(2-METHYL-PROPENYL)TRIMETHYLSILANE-->hydroxytrimethylsilane-->Ethoxytrimethylsilane-->Ethanol-->METHOXYTRIMETHYLSILANE | | Preparation Products | tris(Trimethylsilyloxy)silanol |
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