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169896-41-7 Structure

Identification	Back Directory
[Name] TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE
[CAS] 169896-41-7
[Synonyms] TBTDET TRIS(DIETHYLAMINO)(T-BUTYLIMINO)TANTALUM TRIS(DIETHYLAMIDO)(TERT-BUTYLIMIDO)TANT& TRIS(DIETHYLAMINO)-TERT-BUTYLAMIDO TANTALUM (TERT-BUTYLIMINO)TRIS(DIETHYLAMINO)TANTALUM TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE TRIS(DIETHYLAMIDO)(TERT-BUTYLIMIDO)TANTALUM(V) TRIS(DIETHYLAMINO)(TERT-BUTYLIMINO)TANTALUM(V) TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE, 99.99% (METALS Tantalum tris(diethylamido)-tert-butylimide, 99.99% (metals basis) Tantalum, tris(N-ethylethanaminato)(2-methyl-2-propanaminato(2-))-, (T-4)- (t-ButyliMido)tris(diethylaMino)tantaluM(V), Min. 98% (99.99%-Ta) PURATREM Tris(diethylamido)(tert-butylimido)tantalum(V) 99%, >=99.99% trace metals basis Tris(diethylamido)(tert-butylimido)tantalum(V) packaged for use in deposition systems Tris(diethylaMino)(tert-butyliMino)tantaluM, 99,99% [(C2H5)2N]3Ta=NC4H9 F.W.468,46 FlaMMable liquid
[EINECS(EC#)] 624-910-8
[Molecular Formula] C16H39N4Ta
[MDL Number] MFCD02684506
[MOL File] 169896-41-7.mol
[Molecular Weight] 468.46

Chemical Properties	Back Directory
[Boiling point ] 90°C/0.1mm
[density ] 1.252 g/mL at 25 °C(lit.)
[Fp ] 115 °F
[form ] liquid
[color ] colorless to pale yellow
[Specific Gravity] 1.252
[Water Solubility ] Reacts with water.
[Hydrolytic Sensitivity] 8: reacts rapidly with moisture, water, protic solvents
[Sensitive ] Air Sensitive
[CAS DataBase Reference] 169896-41-7
[EPA Substance Registry System] Tantalum, tris(N-ethylethanaminato)[2-methyl-2-propanaminato(2-)]-, (T-4)- (169896-41-7)

Safety Data	Back Directory
[Hazard Codes ] C
[Risk Statements ] 10-14/15-34
[Safety Statements ] 26-36/37/39-43-45
[RIDADR ] UN 3398 4.3/PG 2
[WGK Germany ] 3
[TSCA ] No
[HazardClass ] 4.3
[PackingGroup ] II

Questions and Answers (Q&A)	Back Directory
[Uses] Useful precursor for the atomic layer deposition of tantalum oxide and tantalum nitride.

Hazard Information	Back Directory
[General Description] Atomic number of base material: 73 Tantalum
[reaction suitability] core: tantalum reagent type: catalyst

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