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Tetramethylammonium hydroxide

CAS No.
75-59-2
Chemical Name:
Tetramethylammonium hydroxide
Synonyms
TMAH;TetramethyL;Developer;Tetramethylammonium hydroxide, 10% in water;TMNOH;N,N,N-TRIMETHYLMETHANAMINIUM HYDROXIDE;Tetramethylammonium hydroxide, 25% w/w in methanol;TETRAMETHYLAMMONIUM HYDROXIDE SOL., 6% IN PROPYLENEGLYCOL;nmd3;nmw-w
CBNumber:
CB2854236
Molecular Formula:
C4H13NO
Molecular Weight:
91.15
MDL Number:
MFCD00008280
MOL File:
75-59-2.mol
MSDS File:
SDS
TDS File:
TDS
Last updated:2026-05-28 00:50:16

Tetramethylammonium hydroxide Properties

Melting point °C
Boiling point 110 °C
Density 0.866 g/mL at 25 °C
vapor pressure 17.5 mm Hg ( 20 °C)
refractive index n20/D 1.384
Flash point 80 °F
storage temp. Store below +30°C.
solubility Methanol (Sparingly), Water (Slightly)
form Solution
color APHA: ≤10
PH >13 (H2O, 20°C)
Odor strong ammonia-like odor
Water Solubility Soluble in water.
Sensitive Air Sensitive
Merck 14,9224
BRN 3558708
Henry's Law Constant 2.3×1010 mol/(m3Pa) at 25℃, HSDB (2015)
Stability Stable. Flammable. Incompatible with strong oxidizing agents, strong acids.
InChI 1S/C4H12N.H2O/c1-5(2,3)4;/h1-4H3;1H2/q+1;/p-1
InChIKey WGTYBPLFGIVFAS-UHFFFAOYSA-M
SMILES [OH-].C[N+](C)(C)C
CAS DataBase Reference 75-59-2(CAS DataBase Reference)
FDA UNII 5GKP7317Q2
EPA Substance Registry System Tetramethylammonium hydroxide (75-59-2)
UNSPSC Code 12352107
NACRES NA.21

SAFETY

Risk and Safety Statements

Symbol(GHS)  Corrosion (GHS05)Exclamation Mark (GHS07)Health Hazard (GHS08)
GHS05,GHS07,GHS08
Signal word  Danger
Hazard statements  H302+H312-H314-H370-H372-H402
Precautionary statements  P501-P273-P260-P270-P264-P280-P308+P311-P362+P364-P303+P361+P353-P301+P330+P331-P301+P312+P330-P304+P340+P310-P305+P351+P338+P310-P405
target organs Eyes,Central nervous system, Liver,thymus
PPE Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter
Hazard Codes  C,T,F,T+,Xn
Risk Statements  24/25-34-20/21/22-39/23/24/25-23/24/25-10-21/22-25-21-11-67-36-52-48/24-27/28-23-35-36/38
Safety Statements  45-36/37/39-26-16-36/37-28
RIDADR  UN 1835 8/PG II (TETRAMETHYLAMMONIUM HYDROXIDE AQUEOUS SOLUTION with more than 2.5 % but less than 25 % tetramethylammonium hydroxide)
RIDADR  UN 1835 8/PG III (TETRAMETHYLAMMONIUM HYDROXIDE AQUEOUS SOLUTION with not more than 2.5 % tetramethylammonium hydroxide)
RIDADR  UN 3423 6.1/PG I (TETRAMETHYLAMMONIUM HYDROXIDE, SOLID)
WGK Germany  1
RTECS  PA0875000
4.4-10-34
TSCA  TSCA listed
HazardClass  3
PackingGroup  II
HS Code  29239000
Storage Class 3 - Flammable liquids
Hazard Classifications Acute Tox. 2 Dermal
Acute Tox. 2 Oral
Acute Tox. 3 Inhalation
Aquatic Chronic 3
Eye Dam. 1
Flam. Liq. 3
Skin Corr. 1B
STOT RE 1 Dermal
STOT SE 1
Hazardous Substances Data 75-59-2(Hazardous Substances Data)
REACH Registrations Active
NFPA 704
1
3 0

Tetramethylammonium hydroxide price More Price(88)

Manufacturer Product number Product description CAS number Packaging Price Updated Buy
Sigma-Aldrich 8.14748 Tetramethylammonium hydroxide (25% solution in water) for synthesis 75-59-2 250ML $60.9 2026-04-30 Buy
Sigma-Aldrich 8.14748 Tetramethylammonium hydroxide (25% solution in water) for synthesis 75-59-2 1L $164 2026-04-30 Buy
Sigma-Aldrich 8.14748 Tetramethylammonium hydroxide (25% solution in water) for synthesis 75-59-2 25kg $1230 2026-04-30 Buy
Sigma-Aldrich 328251 Tetramethylammonium hydroxide solution 10 wt. % in H2O 75-59-2 250ml $78.6 2026-04-30 Buy
Sigma-Aldrich 328251 Tetramethylammonium hydroxide solution 10 wt. % in H2O 75-59-2 1l $191 2026-04-30 Buy
Product number Packaging Price Buy
8.14748 250ML $60.9 Buy
8.14748 1L $164 Buy
8.14748 25kg $1230 Buy
328251 250ml $78.6 Buy
328251 1l $191 Buy

Tetramethylammonium hydroxide Chemical Properties, Uses, Production

Preparation

There are many methods for preparing tetramethylammonium hydroxide, the most common being the silver oxide method, which involves the reaction of tetramethylammonium chloride with silver oxide. However, this method is complex, uses expensive silver oxide as a raw material, and produces a product with high levels of impurity ions, such as halide ions and alkali metal ions. When used in the catalytic polymerization of organosilicon monomers, this severely affects the properties of the organosilicon products and fails to meet the cleaning and corrosion requirements of the electronics industry.
Since the 1970s, foreign countries have adopted a new electrolytic process for preparing tetramethylammonium hydroxide, gradually replacing the silver oxide method. The electrolytic method produces a product of better quality and lower cost, meeting the needs of organosilicon production and entering the electronics industry.

Description

Tetramethylammonium hydroxide is a solid in the hydrated form or a colorless liquid with a strong ammonia-like odor. It is soluble in water, and corrosive to metals and tissue.

Chemical Properties

colourless to yellow liquid

Uses

Industry
Application
Role/benefit
Organic silicon
Production of dimethyl silicone oil, organic silicon resin, silicon rubber, etc.
Catalyst/removed easily; no pollution to the products
Chemical analysis
Polarography experiment
Polarographic reagent
Thermochemolysis to study fungal degradation of wood
Analytical reagent
Chemical purification
Removal of metal elements
Ash free alkali/source of base; make the metal elements precipitated
Electron
Production of computer silicon chip
Brightening agent; anisotropic etching agent; cleaning agent; photoresist developer
Printing of circuit board
Cleaning agent
Semiconductor manufacturing
Chemical stripper
Others
Synthesis of ferrofluid
Surfactant/ inhibit nanoparticle aggregation
Synthesis of zeolite
Structure directing agent

Uses

Tetramethylammonium hydroxide is used to produce tetramethyl-ammonium azide. It is used as an anisotropic etchant of silicon, basic solvent in the development of acidic photoresist in photolithography process, as surfactant in the synthesis of ferrofluid and as a polarographic reagent. It finds application in the production of organic silicon, where it is used for computer silicon wafer surface brightener and cleaning agent. It is also involved in the purification of some metallic elements.
Tetramethylammonium hydroxide solution (25 wt.% solution in water) may be used as a base for pH adjustment to obtain hexagonal mesoporous aluminophosphate (TAP).

General Description

Tetramethylammonium hydroxide is a quaternary ammonium salt generally used as an anisotropic etchant for silicon due to its high silicon etching rate.

Reactivity Profile

Tetramethylammonium hydroxide acts like a base. Bases are chemically similar to sodium hydroxide (NaOH) or sodium oxide (Na2O). They neutralize acids exothermically to form salts plus water. When soluble in water they give solutions having a pH greater than 7.0. Mixing these materials with water can generate troublesome amounts of heat as the base is dissolved or diluted. Bases react with certain metals (such as aluminum and zinc) to form oxides or hydroxides of the metal and generate gaseous hydrogen. Bases may initiate polymerization reactions in polymerizable organic compounds, especially epoxides). They may generate flammable and/or toxic gases with ammonium salts, nitrides, halogenated organics, various metals, peroxides, and hydroperoxides. Materials of this group often serve as catalysts.

Health Hazard

TOXIC; inhalation, ingestion or skin contact with material may cause severe injury or death. Contact with molten substance may cause severe burns to skin and eyes. Avoid any skin contact. Effects of contact or inhalation may be delayed. Fire may produce irritating, corrosive and/or toxic gases. Runoff from fire control or dilution water may be corrosive and/or toxic and cause pollution.

Fire Hazard

Combustible material: may burn but does not ignite readily. When heated, vapors may form explosive mixtures with air: indoors, outdoors and sewers explosion hazards. Contact with metals may evolve flammable hydrogen gas. Containers may explode when heated. Runoff may pollute waterways. Substance may be transported in a molten form.

reaction suitability

reaction type: Acid-base reactions
reaction type: Redox Reactions

Safety Profile

Poison by subcutaneous route. A powerful caustic. A corrosive irritant to skin, eyes, and mucous membranes. When heated to decomposition it emits toxic fumes of NOx and NH3.

Purification Methods

It is freed from chloride ions by passage through an ion-exchange column (e.g. Amberlite IRA-400, prepared in its OH-form by passing 2M NaOH until the effluent is free from chloride ions, then washed with distilled H2O until neutral). A modification, to obtain carbonate-free hydroxide, uses the method of Davies and Nancollas [Nature 165 237 1950]. [Beilstein 4 IV 145.]

References

1.https://en.wikipedia.org/wiki/Tetramethylammonium_hydroxide#Uses
2.http://sacheminc.com/other-chemicals/tetramethylammonium-hydroxide-tmah/
3.https://www.fs.usda.gov/treesearch/pubs/15506
4.https://www.concordia.ca/content/dam/concordia/services/safety/docs/EHS-DOC-020_TMAHGuidelines.pdf
5.https://www.chemicalbook.com/ChemicalProductProperty_EN_CB2854236.htm

Tetramethylammonium hydroxide Preparation Products And Raw materials

Global Suppliers ( 450)
Supplier Tel Email Country ProdList Advantage
Hubei Xinjiecheng Chemical Technology Co., Ltd 13554075426 1014723310@qq.com China 3000 58
Shanghai Aladdin Bio-Chem Technology Co.,LTD 400-6206333 13167063860 anhua.mao@aladdin-e.com China 29985 65
Shandong Mingde Biotechnology Co., Ltd 15564477061 1397986535@qq.com China 272 58
Guangzhou Nalong Chemical Co.Ltd 13192879270; 13192879270 1525037351@qq.com China 3485 58
Shaoguan Mingtu Chemical Co., Ltd 13411131983 2407385074@qq.com China 2046 58
Shanghai Mingyi Pharmaceutical Chemical Co., Ltd. 021-51200341 18717810934 2481589623@qq.com China 30 58
Wuhan Jiyesheng Chemical Co., Ltd 027-83360216 18040558719 3929577992@qq.com China 2180 58
Meryer (Shanghai) Chemical Technology Co., Ltd. 4006356688 18621169109 market03@meryer.com China 40202 62
3B Pharmachem (Wuhan) International Co.,Ltd. 18930552037 3bsc@sina.com China 15813 69
Alfa Aesar 400-6106006 saleschina@alfa-asia.com China 30103 84

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View Latest Price from Tetramethylammonium hydroxide manufacturers

Image Update time Product Price Min. Order Purity Supply Ability Manufacturer
Tetramethylammonium hydroxide pictures 2026-09-16 Tetramethylammonium hydroxide
75-59-2
$5.00 1KG 25% 1000mt/year Jinan Finer Chemical Co., Ltd
Tetramethylammonium hydroxide pictures 2026-03-20 Tetramethylammonium hydroxide
75-59-2
$10.00 1KG 99% 10 mt Hebei Chuanghai Biotechnology Co., Ltd
Tetramethylammonium hydroxide pictures 2025-06-20 Tetramethylammonium hydroxide
75-59-2
1kg 0.99 20tons Hebei Yanxi Chemical Co., Ltd.

Tetramethylammonium hydroxide Spectrum

N,N,N-TRIMETHYLMETHANAMINIUM HYDROXIDE TETRAMETHYLAMMONIUM HYDROXIDE Tetramethylammoniumhydroxide,25%soln.inmethanol Tetramethylammoniumhydroxide,25%w/wAqueousSolution,99.5%(metalsbasis) TETRAMETHYLAMMONIUM HYDROXIDEOL Tetramethylammonium hydroxide, 25 wt% in methanol Tetramethylammonium hydroxide, 25% in water TETRAMETHYLAMMONIUM HYDROXIDE, SOLUTION 1.0 Mol/L in WATER, REAGENT (ACS) TETRAMETHYLAMMONIUM HYDROXIDE, SOLUTION 25% in METHANOL TETRAMETHYLAMMONIUMION TRITONNE Tetramethylammoniumhydroxid (25%ige wssrige Lsung) TETRAMETHYLAMMONIUM HYDROXIDE: 25% AQUEOUS SOLUTION TETRAMETHYLAMMONIUM HYDROXIDE, 25% SOLUTION, SEMICONDUCTOR GRADE TETRAMETHYLAMMONIUM HYDROXIDE SOLUTION IN METHANOL 25% Tetramethylammonium hydroxide, 25 wt. % in water Tetramethylammonium hydroxide, 25% w/w aq. soln., Electronic Grade, 99.9999% (metals basis) Tetramethylammonium Hydroxide (10% in Methanol) Tetramethylammonium Hydroxide (10% in Methanol) [for Photoresist Research] Tetramethylammonium Hydroxide (ca. 25% in Water) TETRAMETHYLAMMONIUM HYDROXIDE 25% in methanol pure TETRAMETHYLAMMONIUM HYDROXIDE 0.1N in isopropanol/methanol extrapure TETRAMETHYLAMMONIUM HYDROXIDE 10% aqueous solution pure Tetramethylammonium hydroxide, 2.38% w/w aq. soln., Electronic Grade, 99.9999% (metals basis) 25% AQUEOUS SOLUTION Tetramethylammonium hydroxide, 25% w/w aq. soln. Developer TetraMethylaMMoniuM Hydroxide Solution, 25 wt. % in H2O tetraMethylazaniuM oxidanide TetraMethylaMMoniuM hydroxide ,0% [25% solution in water] TetraMethylaMMoniuM hydroxide, 10% in water 100GR Tetramethylammonium hydroxide, 10% w/w Aq. Soln, Electronic Grade, 99.9999% (metals basis) TetraMethylaMMoniuM Hydroxide 20% in Water TETRAMETHYLAMMONIUM HYDROXIDE SOLUTION 1 TetraMethylaMMoniuM hydroxide, aqueous solution (TMAH) 4METHYLAMM HYDROX 25%IN H2O TMAH (10% in Methanol) hydroxydedetetramethylammonium megapositcd14 Methanaminium,N,N,N-trimethyl-,hydroxide n,n,n-trimethyl-methanaminiuhydroxide TETRAME-AMMONIUMHYDROXIDE/H20 Tetramethyl ammonium Tetramethylaminonium hydroxide TETRAMETHYLAMMONIUM HYDROXIDE, 10 WT. % SOLUTION IN WATER TETRAMETHYLAMMONIUM HYDROXIDE SOL., 6% IN PROPYLENEGLYCOL TETRAMETHYLAMMONIUM HYDROXIDE, 1.0M SOLN . IN H2O, A.C.S. REAGENT TETRAMETHYLAMMONIUM HYDROXIDE SOLUTION, ~10% IN WATER TETRAMETHYLAMMONIUM HYDROXIDE SOLUTION, ~25% IN WATER Tetramethylammonium hydroxide solution 25 % TETRAMETHYLAMMONIUM HYDROXIDE CONC., FOR IPC, PGE W. 6 VIALS TETRAMETHYLAMMONIUM HYDROXIDE SOLUTION, ~1 M IN WATER TETRAMETHYLAMMONIUM HYDROXIDE SOLUTION, ~10% IN METHANOL TETRAMETHYLAMMONIUM HYDROXIDE SOLUTION S TETRAMETHYLAMMONIUM HYDROXIDE SOL, ~25% IN METHANOL (~2.2 M) 0,1 MOL TETRAMETHYLAMMONIUM HYDROXIDE FI XANAL TETRAMETHYLAMMONIUM HYDROXIDE SOLUTION, ~1.0 M IN WATER TETRAMETHYLAMMONIUM HYDROXIDE SOLUTION 0 ,1 MOL/L IN 2-PROPANOL/ METHANOL