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Trisilane

CAS No.
7783-26-8
Chemical Name:
Trisilane
Synonyms
Trisilane;Trisilicane;Silicopropane;Trisilicopropane;Trisilicon octahydride;λ2-silanylidenesilylidenesilicon
CBNumber:
CB81106567
Molecular Formula:
H8Si3
Molecular Weight:
92.32
MDL Number:
MFCD03701375
MOL File:
7783-26-8.mol
Last updated:2026-05-28 03:35:43

Trisilane Properties

Melting point -117.4°
Boiling point bp 52.9°
Density d0 0.743
refractive index 1.4978
solubility reacts with H2O
form flammable liquid
Specific Gravity 0.7430
color flammable colorless liquid
Water Solubility decomposed by H2O [MER06]
Hydrolytic Sensitivity 10: reacts extremely rapidly with moisture and oxygen - may be pyrophoric - sealed system required
InChI InChI=1S/H8Si3/c1-3-2/h3H2,1-2H3
InChIKey VEDJZFSRVVQBIL-UHFFFAOYSA-N
SMILES [SiH3][SiH2][SiH3]
FDA UNII 1T3A75Z4ZL
EPA Substance Registry System Trisilane (7783-26-8)

SAFETY

Risk and Safety Statements

Symbol(GHS)  Flame (GHS02)
GHS02
Signal word  Danger
Hazard statements  H250
Precautionary statements  P210-P222-P280-P302+P334-P370+P378-P422
TSCA  TSCA listed

Trisilane Chemical Properties,Uses,Production

Preparation

Trisilane is a trace product of the reaction between SiH₂ and HCl, a reaction that requires an infrared laser. The laser is positioned on a stainless steel cylindrical cell perpendicular to the mass spectrometer's laser. Trisilane can also be prepared using the Schlesinger method, which involves reacting lithium aluminum hydride with octachloroTrisilane in n-butyl ether. Furthermore, Pauly, Purnell, and Walsh demonstrated in the 1960s that Trisilane thermally decomposes at high temperatures into silane and ethylsilane.

Uses

Trisilane is a flammable and toxic liquid at room temperature and pressure. Its main uses are in the manufacture of semiconductor silicon films and amorphous silicon.

Properties

Colorless liquid; density 0.743 g/mL at 0°C; freezes at –117.4°C; boils at 52.9°C; vapor density 4.15 g/L at atmospheric pressure; decomposes in water; decomposes in carbon tetrachloride.

Description

Silicon forms a series of hydrides known as silanes, formula SinH2n+2, where n is the number of silicon atoms in the molecule. This general formula for the silicon hydrides is similar to the CnH2n+2 for the alkane class of hydrocarbons.

Chemical Properties

colorless liquid; enthalpy of vaporization 28.38 kJ/mol; vapor pressure at (0°C) 95mm Hg; critical temp 189°C; reacts vigorously with CCl4 and CHCl3 [CIC73] [CRC10] [MER06]

Hazard

Explodes on contact with air, reacts violently with carbon tetrachloride and chloroform.

Trisilane Preparation Products And Raw materials

Raw materials

Preparation Products

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Trisilane Spectrum

Trisilane Silicopropane Trisilicane Trisilicon octahydride Trisilicopropane λ2-silanylidenesilylidenesilicon 7783-26-8 H8Si3