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TETRAKIS(DIETHYLAMINO)TITANIUM
- CAS No.
- 4419-47-0
- Chemical Name:
- TETRAKIS(DIETHYLAMINO)TITANIUM
- Synonyms
- TDEAT;amino)titanium(IV);titanium diethylamide;TITANIUM (IV) DIETHYLAMIDE;Titanium isopropoxide(TDEAT);TETRAKIS(DIETHYLAMINO)TITANIUM;Tetrakis(diethylamion)titanium;TITANIUM TETRAKIS(DIETHYLAMIDE);Tertrakis（diethylamino）titanium;TETRAKIS (DIETHYLAMIDO) TITANIUM
- CBNumber:
- CB8264181
- Molecular Formula:
- C16H40N4Ti
- Molecular Weight:
- 336.38
- MDL Number:
- MFCD00015648
- MOL File:
- 4419-47-0.mol
- MSDS File:
- SDS
Last updated:2026-01-13 11:25:38
| Product description | Number | Pack Size | Price |
| Tetrakis(diethylamido)titanium(IV) technical grade | 407399 | 5G | $205 |
| Tetrakis(diethylamido)titanium(IV) 99.999% trace metals basis | 469866 | 5g | $318 |
| Tetrakis(diethylamido)titanium(IV) 99.999% trace metals basis | 469866 | 25g | $575 |
| Tetrakis(diethylamino)titanium for synthesis | 8.14018 | 5ml | $306 |
| Tetrakis(diethylamino)titanium(IV), 99% | 22-1050 | 5g | $91 |
| More product size | |||
| Melting point | 4 °C |
|---|---|
| Boiling point | 112 °C0.1 mm Hg(lit.) |
| Density | 0.931 g/mL at 25 °C(lit.) |
| refractive index |
n |
| Flash point | -18 °F |
| storage temp. | Store at +2°C to +8°C. |
| solubility | Reacts with air. |
| form | liquid |
| color | yellow to orange |
| Specific Gravity | 0.95 |
| Sensitive | Moisture Sensitive |
| Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents |
| BRN | 3621431 |
| InChI | 1S/4C4H10N.Ti/c4*1-3-5-4-2;/h4*3-4H2,1-2H3;/q4*-1;+4 |
| InChIKey | VJDVOZLYDLHLSM-UHFFFAOYSA-N |
| SMILES | CCN(CC)[Ti](N(CC)CC)(N(CC)CC)N(CC)CC |
| CAS DataBase Reference | 4419-47-0(CAS DataBase Reference) |
| NIST Chemistry Reference | Tetrakis(diethylamino)titanium(4419-47-0) |
| EPA Substance Registry System | Ethanamine, N-ethyl-, titanium(4+) salt (4419-47-0) |
| UNSPSC Code | 12352300 |
| NACRES | NA.23 |
SAFETY
Risk and Safety Statements
| Symbol(GHS) |   GHS02,GHS05 |
|||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Signal word | Danger | |||||||||
| Hazard statements | H225-H260-H314 | |||||||||
| Precautionary statements | P210-P223-P231+P232-P280-P370+P378-P422 | |||||||||
| PPE | Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter | |||||||||
| Hazard Codes | F,C,Xi | |||||||||
| Risk Statements | 11-14/15-34-36/37/38 | |||||||||
| Safety Statements | 26-36/37/39-43-45-37/39-16 | |||||||||
| RIDADR | UN 3398 4.3/PG 1 | |||||||||
| WGK Germany | 3 | |||||||||
| F | 10-21 | |||||||||
| TSCA | TSCA listed | |||||||||
| HS Code | 2921 19 50 | |||||||||
| HazardClass | 4.3 | |||||||||
| PackingGroup | II | |||||||||
| Storage Class | 4.3 - Hazardous materials which set free flammable gases upon contact with water | |||||||||
| Hazard Classifications | Flam. Liq. 2 Skin Corr. 1B Water-react 1 |
|||||||||
| NFPA 704 |
|
TETRAKIS(DIETHYLAMINO)TITANIUM price More Price(13)
| Manufacturer | Product number | Product description | CAS number | Packaging | Price | Updated | Buy |
|---|---|---|---|---|---|---|---|
| Sigma-Aldrich | 407399 | Tetrakis(diethylamido)titanium(IV) technical grade | 4419-47-0 | 5G | $205 | 2023-06-20 | Buy |
| Sigma-Aldrich | 469866 | Tetrakis(diethylamido)titanium(IV) 99.999% trace metals basis | 4419-47-0 | 5g | $318 | 2023-01-07 | Buy |
| Sigma-Aldrich | 469866 | Tetrakis(diethylamido)titanium(IV) 99.999% trace metals basis | 4419-47-0 | 25g | $575 | 2023-01-07 | Buy |
| Sigma-Aldrich | 8.14018 | Tetrakis(diethylamino)titanium for synthesis | 4419-47-0 | 5ml | $306 | 2022-05-15 | Buy |
| Strem Chemicals | 22-1050 | Tetrakis(diethylamino)titanium(IV), 99% | 4419-47-0 | 5g | $91 | 2024-03-01 | Buy |
TETRAKIS(DIETHYLAMINO)TITANIUM Chemical Properties,Uses,Production
Description
Tetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.
Reference
- Kim, Ju Youn, et al. "Comparison of TiN Films Deposited Using Tetrakisdimethylaminotitanium and Tetrakisdiethylaminotitanium by the Atomic Layer Deposition Method." Japanese Journal of Applied Physics 42.7A (2003):4245-4248.
- Katamreddy, Rajesh, et al. "Ti source precursors for atomic layer deposition of TiO2, STO and BST." Ecs Transactions 16.4(2008):660-71.
- Shoemaker, Erika Leigh, et al. "Process for reactive ion etching a layer of diamond like carbon." US, US8409458. 2013.
Chemical Properties
Clear dark red liquid
Uses
General Description
Atomic number of base material: 22 Titanium
reaction suitability
core: titanium
reagent type: catalyst
Purification Methods
Dissolve it in *C6H6, filter if a solid separates, evaporate under reduced pressure and distil it. It is an orange liquid which reacts violently with alcohols. [Bradley et al. J Chem Soc 3857 1960, Beilstein 4 IV 313.]
TETRAKIS(DIETHYLAMINO)TITANIUM Preparation Products And Raw materials
Raw materials
Preparation Products
Global( 91)Suppliers
| Supplier | Tel | Country | ProdList | Advantage | |
|---|---|---|---|---|---|
| City Chemical LLC | 2039322489 | sales@citychemical.com | United States | 168 | 58 |
| Hefei TNJ Chemical Industry Co.,Ltd. | +86-0551-65418671 +8618949823763 | sales@tnjchem.com | China | 34563 | 58 |
| Hunan russell chemicals technology co ltd | 731-88557738 +8613739093081 | sales01@russellchem.com | CHINA | 291 | 58 |
| Xi'an MC Biotech, Co., Ltd. | 029-89275612 +8618991951683 | mcbio_sales@163.com | China | 2251 | 58 |
| Shaanxi Dideu Medichem Co. Ltd | +86-029-89586680 +86-18192503167 | 1026@dideu.com | China | 7099 | 58 |
| Dayang Chem (Hangzhou) Co.,Ltd. | +86-0571-88938639 +8617705817739 | info@dycnchem.com | China | 52846 | 58 |
| PT CHEM GROUP LIMITED | +86-85511178; | peter68@ptchemgroup.com | China | 35425 | 58 |
| GIHI CHEMICALS CO.,LIMITED | +86-571-86217390; +8618058761490 | info@gihichemicals.com | China | 49958 | 58 |
| SUZHOU SENFEIDA CHEMICAL CO.,LTD | +86-0512-83500002 +8618662433356 | 3899766280@qq.com | China | 26362 | 58 |
| Henan Fengda Chemical Co., Ltd | +86-371-86557731 +86-13613820652 | info@fdachem.com | China | 20128 | 58 |
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Tetrakis(diethylaMino)titaniuM(IV), 99%, 22-1050, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD
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Tetrakis(diethylamino)titanium for synthesis
Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD
amino)titanium(IV)
TETRAKIS(DIETHYLAMINO)TITANIUM ISO 9001：2015 REACH
Titanium isopropoxide(TDEAT)
Tertrakis（diethylamino）titanium
Tetrakis(diethylamido)titanium(IV), TDEAT
4419-47-0
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C2H52N4Ti
C8H40N4TI
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C16H40N4Ti
Catalysis and Inorganic Chemistry
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metal amide complex
