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Tetrakis(diethylamino)titanium

Tetrakis(diethylamino)titanium Structure
Tetrakis(diethylamino)titanium structure
CAS No.
4419-47-0
Chemical Name:
Tetrakis(diethylamino)titanium
Synonyms
TDEAT;amino)titanium(IV);titanium diethylamide;TITANIUM (IV) DIETHYLAMIDE;Titanium isopropoxide(TDEAT);Tetrakis(diethylamion)titanium;Tetrakis(diethylamino)titanium;TITANIUM TETRAKIS(DIETHYLAMIDE);Tertrakis（diethylamino）titanium;TETRAKIS (DIETHYLAMIDO) TITANIUM
CBNumber:
CB8264181
Molecular Formula:
C16H40N4Ti
Molecular Weight:
336.38
MDL Number:
MFCD00015648
MOL File:
4419-47-0.mol
MSDS File:
SDS
Last updated:2026-09-12 18:55:36
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Tetrakis(diethylamino)titanium Properties

Melting point 4 °C
Boiling point 112 °C0.1 mm Hg(lit.)
Density 0.931 g/mL at 25 °C(lit.)
refractive index n20/D 1.536(lit.)
Flash point -18 °F
storage temp. Store at +2°C to +8°C.
solubility Reacts with air.
form liquid
color yellow to orange
Specific Gravity 0.95
Hydrolytic Sensitivity 8: reacts rapidly with moisture, water, protic solvents
Sensitive Moisture Sensitive
BRN 3621431
InChI 1S/4C4H10N.Ti/c4*1-3-5-4-2;/h4*3-4H2,1-2H3;/q4*-1;+4
InChIKey VJDVOZLYDLHLSM-UHFFFAOYSA-N
SMILES CCN(CC)[Ti](N(CC)CC)(N(CC)CC)N(CC)CC
CAS DataBase Reference 4419-47-0(CAS DataBase Reference)
NIST Chemistry Reference Tetrakis(diethylamino)titanium(4419-47-0)
EPA Substance Registry System Ethanamine, N-ethyl-, titanium(4+) salt (4419-47-0)
UNSPSC Code 12352300
NACRES NA.23

SAFETY

Risk and Safety Statements

Symbol(GHS)  Flame (GHS02)Corrosion (GHS05)
GHS02,GHS05
Signal word  Danger
Hazard statements  H225-H260-H314
Precautionary statements  P210-P223-P231+P232-P280-P370+P378-P422
PPE Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter
Hazard Codes  F,C,Xi
Risk Statements  11-14/15-34-36/37/38
Safety Statements  26-36/37/39-43-45-37/39-16
RIDADR  UN 3398 4.3/PG 1
WGK Germany  3
F  10-21
TSCA  TSCA listed
HS Code  2921 19 50
HazardClass  4.3
PackingGroup  II
Storage Class 4.3 - Hazardous materials which set free flammable gases upon contact with water
Hazard Classifications Flam. Liq. 2
Skin Corr. 1B
Water-react 1
REACH Registrations Inactive
NFPA 704
3
2 0

Tetrakis(diethylamino)titanium price More Price(13)

Manufacturer Product number Product description CAS number Packaging Price Updated Buy
Sigma-Aldrich 407399 Tetrakis(diethylamido)titanium(IV) technical grade 4419-47-0 5G $205 2023-06-20 Buy
Sigma-Aldrich 469866 Tetrakis(diethylamido)titanium(IV) 99.999% trace metals basis 4419-47-0 5g $318 2023-01-07 Buy
Sigma-Aldrich 469866 Tetrakis(diethylamido)titanium(IV) 99.999% trace metals basis 4419-47-0 25g $575 2023-01-07 Buy
Sigma-Aldrich 8.14018 Tetrakis(diethylamino)titanium for synthesis 4419-47-0 5ml $306 2022-05-15 Buy
Strem Chemicals 98-4043 Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD 99% 4419-47-0 10g $1264 2026-04-30 Buy
Product number Packaging Price Buy
407399 5G $205 Buy
469866 5g $318 Buy
469866 25g $575 Buy
8.14018 5ml $306 Buy
98-4043 10g $1264 Buy

Tetrakis(diethylamino)titanium Chemical Properties, Uses, Production

Description

Tetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.

Reference

  1. Kim, Ju Youn, et al. "Comparison of TiN Films Deposited Using Tetrakisdimethylaminotitanium and Tetrakisdiethylaminotitanium by the Atomic Layer Deposition Method." Japanese Journal of Applied Physics 42.7A (2003):4245-4248.
  2. Katamreddy, Rajesh, et al. "Ti source precursors for atomic layer deposition of TiO2, STO and BST." Ecs Transactions 16.4(2008):660-71.
  3. Shoemaker, Erika Leigh, et al. "Process for reactive ion etching a layer of diamond like carbon." US, US8409458. 2013.

Chemical Properties

Clear dark red liquid

Uses

Precursors Packaged for Depositions Systems

General Description

Atomic number of base material: 22 Titanium

reaction suitability

core: titanium
reagent type: catalyst

Purification Methods

Dissolve it in *C6H6, filter if a solid separates, evaporate under reduced pressure and distil it. It is an orange liquid which reacts violently with alcohols. [Bradley et al. J Chem Soc 3857 1960, Beilstein 4 IV 313.]

Tetrakis(diethylamino)titanium Preparation Products And Raw materials

Raw materials

Preparation Products

Tetrakis(diethylamino)titanium Suppliers

Global Suppliers ( 93)
Supplier Tel Email Country ProdList Advantage
J & K SCIENTIFIC LTD. 18210857532 18210857532 jkinfo@jkchemical.com China 96815 76
Meryer (Shanghai) Chemical Technology Co., Ltd. 4006356688 18621169109 market03@meryer.com China 40202 62
INTATRADE GmbH +49 3493/605464 sales@intatrade.de Germany 3563 66
Alfa Aesar 400-6106006 saleschina@alfa-asia.com China 30103 84
Energy Chemical 400-0056266 sales8178@energy-chemical.com China 44850 61
Shanghai Hanhong Scientific Co.,Ltd. 021-54306202 13764082696 info@hanhongsci.com China 42917 64
Shandong Xiya Chemical Co., Ltd 13355009207 13355009207 3007715519@qq.com China 18722 57
Syntechem Co.,Ltd info@syntechem.com China 12973 57
Tianjin heowns Biochemical Technology Co., Ltd. 400 638 7771 sales@heowns.com China 14412 57
Thermo Fisher Scientific 800-810-5118 cnchemical@thermofisher.com China 17752 75
Supplier Advantage
J & K SCIENTIFIC LTD. 76
Meryer (Shanghai) Chemical Technology Co., Ltd. 62
INTATRADE GmbH 66
Alfa Aesar 84
Energy Chemical 61
Shanghai Hanhong Scientific Co.,Ltd. 64
Shandong Xiya Chemical Co., Ltd 57
Syntechem Co.,Ltd 57
Tianjin heowns Biochemical Technology Co., Ltd. 57
Thermo Fisher Scientific 75

Tetrakis(diethylamino)titanium Spectrum

TETRAKIS(DIETHYLAMINO)TITANIUM(4419-47-0)1HNMRTETRAKIS(DIETHYLAMINO)TITANIUM(4419-47-0)FT-IR

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TDEAT TETRAKIS (DIETHYLAMIDO) TITANIUM TETRAKIS DIETHYL AMINO TITANIUM (IV) TITANIUM (IV) DIETHYLAMIDE TITANIUM TETRAKIS(DIETHYLAMIDE) Titanium, tetrakis(diethylamino)- TETRAKIS(DIETHYLAMINO)TITANIUM, 99.999% TETRAKIS(DIETHYLAMINO)TITANIUM, TECH. Tetrakis(diethylamino)titanium,99.99%(metalsbasis) Tetrakis(diethylamino)titanium,99% Ethanamine, N-ethyl-, titanium(4+) salt tetrakis(diethylamido)titanium(iv) titanium diethylamide Tetrakis(diethylamino)titanium(IV), Titanium(IV) tetrakis(diethylamide) Tetrakis(diethylamion)titanium Titanium(IV) tetrakis(diethylamide) Tetrakis(diethylamino)titanium, 99%, 22-1050, contained in 50 ml Swagelok cylinder for CVD/ALD Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok cylinder for CVD/ALD Titanium(IV) Diethylamide 99.99% Tetrakis(diethylaMino)titaniuM(IV), 99.99% (Metals basis) TETRAKIS(DIETHYLAMINO)TITANIUM FOR SYNTH TITANIUM TETRAKIS(DIETHYLAMIDE), 99+% Tetrakis(diethylaMino)titaniuM(IV), 99%, 22-1050, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD Tetrakis(diethylamido)titanium(IV) 99.999% trace metals basis Tetrakis(diethylamino)titanium for synthesis Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD amino)titanium(IV) TETRAKIS(DIETHYLAMINO)TITANIUM ISO 9001：2015 REACH Titanium isopropoxide(TDEAT) Tertrakis（diethylamino）titanium Tetrakis(diethylamido)titanium(IV), TDEAT Tetrakis(diethylamino)titanium 4419-47-0 TiNC2H524 C2H52N4Ti C8H40N4TI C4H11N14Ti C16H40N4Ti Catalysis and Inorganic Chemistry Titanium metal amide complex