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| | TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Basic information |
| Product Name: | TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM | | Synonyms: | TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM;ZIRCONIUM TETRAKIS(ETHYLMETHYLAMIDE);Tetrakis(ethyl Methyl amido) zirconium;tetrakis(ethylmethylamido)zirconium(iv);tetrakis(ethylmethylamino)zirconium(iv);Tetrakis(ethylmethylamino)zirconium(IV) 99%, 40-1710, contained in 50 ml Swagelok cylinder for CVD/ALD;Tetrakis(ethylmethylamido)zirconium(IV), 99% TEMAZ, 40-1710, contained in 50 ml Swagelok cylinder for CVD/ALD;Tetrakis(ethylmethylamino)zirconium 99.999% | | CAS: | 175923-04-3 | | MF: | C12H32N4Zr | | MW: | 323.63 | | EINECS: | | | Product Categories: | ALD Precursors;metal amide complex | | Mol File: | 175923-04-3.mol |  |
| | TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Chemical Properties |
| Boiling point | 81 °C0.1 mm Hg(lit.) | | density | 1.049 g/mL at 25 °C(lit.) | | Fp | 50 °F | | form | liquid | | Specific Gravity | 1.049 | | color | light yellow | | Sensitive | Air & Moisture Sensitive | | Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents | | InChI | InChI=1S/4C3H8N.Zr/c4*1-3-4-2;/h4*3H2,1-2H3;/q4*-1;+4 | | InChIKey | SRLSISLWUNZOOB-UHFFFAOYSA-N | | SMILES | [Zr](N(C)CC)(N(C)CC)(N(C)CC)N(C)CC |
| Hazard Codes | F,Xi | | Risk Statements | 11-14-36/37/38-14/15 | | Safety Statements | 16-26-36 | | RIDADR | UN 3398 4.3/PG 2 | | WGK Germany | 3 | | TSCA | No | | HazardClass | 4.3 | | PackingGroup | II | | Storage Class | 4.3 - Hazardous materials which set free flammable gases upon contact with water | | Hazard Classifications | Eye Irrit. 2
Flam. Liq. 2
Skin Irrit. 2
STOT SE 3
Water-react 2 |
| | TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Usage And Synthesis |
| | TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Preparation Products And Raw materials |
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