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Tantalum Tris(diethylamido)-tert-butylimide

CAS No.
169896-41-7
Chemical Name:
Tantalum Tris(diethylamido)-tert-butylimide
Synonyms
TBTDET;PURATREM;tert-butyliminotantalum;tert-butyliminotantalum,diethylazanide;TRIS(DIETHYLAMIDO)(TERT-BUTYLIMIDO)TANT&;TRIS(DIETHYLAMINO)(T-BUTYLIMINO)TANTALUM;t-Butyliminotris(diethylamino)tantalum(V);TRIS(DIETHYLAMINO)-TERT-BUTYLAMIDO TANTALUM;(TERT-BUTYLIMINO)TRIS(DIETHYLAMINO)TANTALUM;(t-Butylimido)tris(diethylamino)tantalum(V)
CBNumber:
CB0246411
Molecular Formula:
C16H39N4Ta
Molecular Weight:
468.46
MDL Number:
MFCD02684506
MOL File:
169896-41-7.mol
MSDS File:
SDS
Last updated:2026-09-12 18:48:00

Tantalum Tris(diethylamido)-tert-butylimide Properties

Boiling point 90°C/0.1mm
Density 1.252 g/mL at 25 °C (lit.)
Flash point 115 °F
form liquid
color colorless to pale yellow
Specific Gravity 1.252
Water Solubility Reacts with water.
Sensitive Air Sensitive
Hydrolytic Sensitivity 8: reacts rapidly with moisture, water, protic solvents
InChI 1S/C4H9N.3C4H10N.Ta/c1-4(2,3)5;3*1-3-5-4-2;/h1-3H3;3*3-4H2,1-2H3;/q;3*-1;+3
InChIKey YYKBKTFUORICGA-UHFFFAOYSA-N
SMILES CCN(CC)[Ta](=NC(C)(C)C)(N(CC)CC)N(CC)CC
CAS DataBase Reference 169896-41-7
EPA Substance Registry System Tantalum, tris(N-ethylethanaminato)[2-methyl-2-propanaminato(2-)]-, (T-4)- (169896-41-7)
UNSPSC Code 12352103
NACRES NA.23

SAFETY

Risk and Safety Statements

Symbol(GHS)  Flame (GHS02)Corrosion (GHS05)
GHS02,GHS05
Signal word  Danger
Hazard statements  H318-H226-H261-H314
Precautionary statements  P223-P303+P361+P353-P405-P501a-P231+P232-P280-P305+P351+P338-P310-P422
PPE Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter
Hazard Codes  C
Risk Statements  10-14/15-34
Safety Statements  26-36/37/39-43-45
RIDADR  UN 3398 4.3/PG 2
WGK Germany  3
TSCA  TSCA listed
HazardClass  4.3
PackingGroup  II
Storage Class 4.3 - Hazardous materials which set free flammable gases upon contact with water
Hazard Classifications Eye Dam. 1
Flam. Liq. 2
Skin Corr. 1B
Water-react 1
NFPA 704
2
3 2
W

Tantalum Tris(diethylamido)-tert-butylimide price More Price(10)

Manufacturer Product number Product description CAS number Packaging Price Updated Buy
Sigma-Aldrich 668990 Tris(diethylamido)(tert-butylimido)tantalum(V) packaged for use in deposition systems 169896-41-7 10g $2720 2026-04-30 Buy
Sigma-Aldrich 521280 Tris(diethylamido)(tert-butylimido)tantalum(V) 99%, ≥99.99% trace metals basis 169896-41-7 5ml $622 2026-04-30 Buy
Strem Chemicals 73-0723 (t-Butylimido)tris(diethyl­amino)tantalum(V), min. 98% (99.99%-Ta) PURATREM TBTDET (99.99%-Ta) 169896-41-7 250mg $52 2026-04-30 Buy
Strem Chemicals 73-0723 (t-Butylimido)tris(diethyl­amino)tantalum(V), min. 98% (99.99%-Ta) PURATREM TBTDET (99.99%-Ta) 169896-41-7 1g $120 2026-04-30 Buy
Strem Chemicals 73-0723 (t-Butylimido)tris(diethyl­amino)tantalum(V), min. 98% (99.99%-Ta) PURATREM TBTDET (99.99%-Ta) 169896-41-7 5g $481 2026-04-30 Buy
Product number Packaging Price Buy
668990 10g $2720 Buy
521280 5ml $622 Buy
73-0723 250mg $52 Buy
73-0723 1g $120 Buy
73-0723 5g $481 Buy

Tantalum Tris(diethylamido)-tert-butylimide Chemical Properties, Uses, Production

Uses

Tantalum tris(diethylamido)-tert-butylimide is a useful precursor for the atomic layer deposition of tantalum oxide and tantalum nitride.

Uses

Tantalum tris(diethylamido)-tert-butylimide is used as a precursor for tantalum nitride.

General Description

Atomic number of base material: 73 Tantalum

reaction suitability

core: tantalum
reagent type: catalyst

Tantalum Tris(diethylamido)-tert-butylimide Preparation Products And Raw materials

Raw materials

Preparation Products

Global Suppliers ( 70)
Supplier Tel Email Country ProdList Advantage
J & K SCIENTIFIC LTD. 18210857532 18210857532 jkinfo@jkchemical.com China 96815 76
Meryer (Shanghai) Chemical Technology Co., Ltd. 4006356688 18621169109 market03@meryer.com China 40202 62
INTATRADE GmbH +49 3493/605464 sales@intatrade.de Germany 3563 66
Alfa Aesar 400-6106006 saleschina@alfa-asia.com China 30103 84
Energy Chemical 400-0056266 sales8178@energy-chemical.com China 44850 61
Shanghai Boc Chemical Co.,Ltd 021-34975603-808 18721111801 sales@bocpharma.com China 991 64
Shanghai Hanhong Scientific Co.,Ltd. 021-54306202 13764082696 info@hanhongsci.com China 42917 64
Sigma-Aldrich 021-61415566 800-8193336 orderCN@merckgroup.com China 51389 80
LaaJoo 021-60702684 18516024827 huang.jiayi@sinocompound.com China 2280 58
Guangzhou Jhd Chemical Reagent Co., Ltd. 020-84383047 sales@jhd.com.cn China 9177 65
(TERT-BUTYLIMINO)TRIS(DIETHYLAMINO)TANTALUM TRIS(DIETHYLAMIDO)(TERT-BUTYLIMIDO)TANTALUM(V) TRIS(DIETHYLAMINO)(T-BUTYLIMINO)TANTALUM TRIS(DIETHYLAMINO)-TERT-BUTYLAMIDO TANTALUM TRIS(DIETHYLAMINO)(TERT-BUTYLIMINO)TANTALUM(V) tert-butyliminotantalum,diethylazanide TRIS(DIETHYLAMIDO)(TERT-BUTYLIMIDO)TANT& TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE, 99.99% (METALS Tantalum tris(diethylamido)-tert-butylimide, 99.99% (metals basis) Tantalum, tris(N-ethylethanaminato)(2-methyl-2-propanaminato(2-))-, (T-4)- Tris(diethylaMino)(tert-butyliMino)tantaluM, 99,99% [(C2H5)2N]3Ta=NC4H9 F.W.468,46 FlaMMable liquid (t-ButyliMido)tris(diethylaMino)tantaluM(V), Min. 98% (99.99%-Ta) PURATREM Tris(diethylamido)(tert-butylimido)tantalum(V) 99%, >=99.99% trace metals basis Tris(diethylamido)(tert-butylimido)tantalum(V) packaged for use in deposition systems (T-BUTYLIMIDO)TRIS(DIETHYLAMINO)TANTALUM(V),MIN.98%(99.99%-TA)PURATREMTBTDET t-Butyliminotris(diethylamino)tantalum(V) TBTDET: (t-Butylimido)tris(diethylamino)tantalum(V) PURATREM TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE ISO 9001:2015 REACH tert-butyliminotantalum (tert-butylimino)tris(diethylamino)tantalum(TBTDET) (t-Butylimido)tris(diethylamino)tantalum(V) Tris(diethylamido)(tert-butylimido)tantalum(V) Tantalum(tert-butylamide)tris(diethylamino) Tris(diethylamido)(tert-butylimido)tantalum(V) TBTDET tert-Butylimido tris(diethylamido)tantalum, TBTDET TBTDET Tantalum Tris(diethylamido)-tert-butylimide 169896-41-7 C16H39N4Ta CH33CNTaNC2H523 Tantalum Catalysis and Inorganic Chemistry