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Tris(dimethylamino)silane

Tris(dimethylamino)silane structure

CAS No.: 15112-89-7

Chemical Name:: Tris(dimethylamino)silane

Synonyms: 3DMAS;TDMAS;DK087;LS 1460;amino)siL;(Me2N)3SiH;3DMAS : [(CH3)2N]3SiH;Tris(dimethyamino)silane;Tri(dimethylamino)silane;Tris(dimethylamido)silane

CBNumber:: CB1241150

Molecular Formula:: C6H19N3Si

Molecular Weight:: 161.32

MDL Number:: MFCD00048006

MOL File:: 15112-89-7.mol

MSDS File:: SDS

TDS File:: TDS

Last updated:2026-09-12 18:49:05

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Tris(dimethylamino)silane Properties

Melting point	<0°C
Boiling point	145 °C
Density	0,838 g/cm³
refractive index	1.4247
Flash point	25°C
storage temp.	2-8°C, protect from light
form	liquid
pka	10.93±0.70(Predicted)
Specific Gravity	0.84
color	colorless to light yellow
Sensitive	air sensitive, moisture sensitive
Hydrolytic Sensitivity	8: reacts rapidly with moisture, water, protic solvents
InChI	1S/C6H19N3Si/c1-7(2)10(8(3)4)9(5)6/h10H,1-6H3
InChIKey	TWVSWDVJBJKDAA-UHFFFAOYSA-N
SMILES	CN(C)[SiH](N(C)C)N(C)C
EPA Substance Registry System	N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7)
UNSPSC Code	12352300
NACRES	NA.23

SAFETY

Risk and Safety Statements

Symbol(GHS)	GHS02,GHS05,GHS06
Signal word	Danger
Hazard statements	H225-H261-H302-H311-H314-H330
Precautionary statements	P210-P231+P232-P280-P303+P361+P353-P304+P340+P310-P305+P351+P338
Hazard Codes	F,C
Risk Statements	10-36/37/38-52/53-34-29-20-15-11
Safety Statements	16-26-36/37/39-45-43
RIDADR	1993
WGK Germany	3
RTECS	VV5800000
TSCA	TSCA listed
Storage Class	4.3 - Hazardous materials which set free flammable gases upon contact with water
Hazard Classifications	Acute Tox. 3 Dermal Acute Tox. 3 Inhalation Acute Tox. 4 Oral Eye Dam. 1 Flam. Liq. 2 Skin Corr. 1B Water-react 2
Toxicity	rabbit,LD50,skin,477mg/kg (477mg/kg),LIVER: OTHER CHANGESLUNGS, THORAX, OR RESPIRATION: CHRONIC PULMONARY EDEMA,Toxicology and Industrial Health. Vol. 5, Pg. 45, 1989.
REACH Registrations	Active

Tris(dimethylamino)silane price More Price(12)

Manufacturer	Product number	Product description	CAS number	Packaging	Price	Updated	Buy
Sigma-Aldrich	759562	Tris(dimethylamino)silane packaged for use in deposition systems	15112-89-7	25g	$1080	2026-04-30	Buy
Sigma-Aldrich	570133	Tris(dimethylamino)silane electronic grade, 99.999%	15112-89-7	25g	$235	2026-04-30	Buy
Strem Chemicals	14-8750	Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM (99.999%-Si)	15112-89-7	5g	$76	2026-04-30	Buy
Strem Chemicals	98-4035	Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD (99.999%-Si)	15112-89-7	25g	$1295	2026-04-30	Buy
Strem Chemicals	14-8750	Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM (99.999%-Si)	15112-89-7	25g	$217	2026-04-30	Buy

Product number	Packaging	Price	Buy
759562	25g	$1080	Buy
570133	25g	$235	Buy
14-8750	5g	$76	Buy
98-4035	25g	$1295	Buy
14-8750	25g	$217	Buy

Tris(dimethylamino)silane Chemical Properties,Uses,Production

Uses

Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.

General Description

Please inquire for quantity, pricing, and packaging options.

reaction suitability

reagent type: reductant

Synthesis

A method for preparing tris(dimethylamino)silane, comprising the steps of: adding dimethylamine and a hydrocarbon solvent to a reactor under the protection of an inert atmosphere, and then adding an organolithium compound to the system to produce a lithium salt of dimethylamine; adding trichlorosilane to the system; and distilling at the end of the reaction to obtain tris(dimethylamino)silane.

Tris(dimethylamino)silane Preparation Products And Raw materials

Raw materials

Preparation Products

Tris(dimethylamino)silane Suppliers

Global( 95)Suppliers

Supplier	Tel	Email	Country	ProdList	Advantage
Shanghai Boyle Chemical Co., Ltd.	021-50182298 021-50180596	sales@boylechem.com	China	2202	55
J & K SCIENTIFIC LTD.	18210857532 18210857532	jkinfo@jkchemical.com	China	96815	76
Meryer (Shanghai) Chemical Technology Co., Ltd.	4006356688 18621169109	market03@meryer.com	China	40202	62
INTATRADE GmbH	+49 3493/605464	sales@intatrade.de	Germany	3563	66
Beijing HwrkChemical Technology Co., Ltd	89508211 18501085097	sales.bj@hwrkchemical.com	China	9407	55
Energy Chemical	400-0056266	sales8178@energy-chemical.com	China	44850	61
Shanghai Boc Chemical Co.,Ltd	021-34975603-808 18721111801	sales@bocpharma.com	China	991	64
Shanghai Hanhong Scientific Co.,Ltd.	021-54306202 13764082696	info@hanhongsci.com	China	42917	64
Novel Chemical	+86-21-64855560, 4008207808	sales@novelglobal.com	China	124	62
Shanghai Gileader Advanced Material Technology Co.,Ltd	18516111942	823898732@qq.com	China	1356	56

Supplier	Advantage
Shanghai Boyle Chemical Co., Ltd.	55
J & K SCIENTIFIC LTD.	76
Meryer (Shanghai) Chemical Technology Co., Ltd.	62
INTATRADE GmbH	66
Beijing HwrkChemical Technology Co., Ltd	55
Energy Chemical	61
Shanghai Boc Chemical Co.,Ltd	64
Shanghai Hanhong Scientific Co.,Ltd.	64
Novel Chemical	62
Shanghai Gileader Advanced Material Technology Co.,Ltd	56

View Lastest Price from Tris(dimethylamino)silane manufacturers

Update time	Product	Price	Min. Order	Purity	Supply Ability	Manufacturer
2026-08-25	tris(dimethylamino)silane 15112-89-7	$3.00-9.00		99%		ZHENGZHOU JIUYI TIME NEW MATERIALS CO,.LTD
2026-06-30	TRIS(DIMETHYLAMINO)SILANE 15112-89-7		1KG	98.0%	10000KGS	Shaanxi Dideu New Materials Co. Ltd
2025-12-24	TRIS(DIMETHYLAMINO)SILANE 15112-89-7		1KG	99.0%	1000 tons	Shaanxi Dideu Medichem Co. Ltd

tris(dimethylamino)silane
15112-89-7
$3.00-9.00
99%
ZHENGZHOU JIUYI TIME NEW MATERIALS CO,.LTD

TRIS(DIMETHYLAMINO)SILANE
15112-89-7
98.0%
Shaanxi Dideu New Materials Co. Ltd

TRIS(DIMETHYLAMINO)SILANE
15112-89-7
$0.10
99.0%
Shaanxi Dideu Medichem Co. Ltd

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n,n,n’,n’,n’’,n’’-hexamethyl-silanetriamin n,n,n’,n’,n’’,n’’-hexamethylsilanetriamine N,N,N’,N’,N’’,N’’-hexamethyl-Silanetriamine TRIS(DIMETHYLAMINO)SILANE 99+% N,N',N''-(Silanetriyl)tris(dimethylamine) N,N',N''-Silanetriyltris(dimethylamine) TRIS(DIMETHYLAMINO)SILANE, 99.9+% Tris(diMethylaMino)silane, 99+%, 14-8750, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD (Me2N)3SiH Tris(dimethylamido)silane Tris(dimethylamino)silane electronic grade, 99.999% Tris(dimethylamino)silane packaged for use in deposition systems Tris(dimethyamino)silane N,N,N',N',N'',N''-hexamethyl-Silanetriamine tris(Dimethylamino)silane n,n,n',n',n'',n''-hexamethylsilanetriamine n,n,n',n',n'',n''-hexamethyl-silanetriamin Silanetriamine,N,N,N',N',N'',N''-hexamethyl- Tri(dimethylamino)silane LS 1460 Tris(dimethylamino)silane, 99+% 3DMAS 3DMAS : [(CH3)2N]3SiH Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok cylinder (96-1070) for CVD/ALD Tris(dimethylamino)silane Liquid amino)siL Silanetriamine, N,N,N',N',N'',N''-hexamethyl- Tris(dimethylamino)silane 3DMAS TRIS(DIMETHYLAMINO)SILANE ISO 9001：2015 REACH DK087 N,N,N',N',N'',N''-Hexamethylsilanetriamine High Purity Tris(dimethylamino)silane tri(dimethylamineyl)siliconalkane 3DMAS TDMAS Tris(dimethylamino)silane 15112-89-7 CH32N3SiH C6H19N3Si ALD Precursors organosilicon compounds