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ChemicalBook >> CAS DataBase List >> Tris(dimethylamino)silane

Tris(dimethylamino)silane

Tris(dimethylamino)silane price.
  • $37 - $1380.11
  • Product name: Tris(dimethylamino)silane
  • CAS: 15112-89-7
  • MF: C6H19N3Si
  • MW: 161.32
  • EINECS:239-165-0
  • MDL Number:MFCD00048006
  • Synonyms:n,n,n’,n’,n’’,n’’-hexamethyl-silanetriamin ;n,n,n’,n’,n’’,n’’-hexamethylsilanetriamine ;N,N,N’,N’,N’’,N’’-hexamethyl-Silanetriamine ;TRIS(DIMETHYLAMINO)SILANE 99+%;N,N',N''-(Silanetriyl)tris(dimethylamine);N,N',N''-Silanetriyltris(dimethylamine);TRIS(DIMETHYLAMINO)SILANE, 99.9+%;Tris(diMethylaMino)silane, 99+%, 14-8750, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD
Price12 Properties Safety Information Description
12 prices
Selected condition：
Brand
  • aablocks
  • American Custom Chemicals Corporation
  • Chem-Impex
  • Sigma-Aldrich
  • Strem Chemicals
Package
  • 250mg
  • 1g
  • 5g
  • 10G
  • 25g
  • Manufactureraablocks
  • Product numberAA001N19
  • Product descriptionN,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine ≥99%,≥99.999%metalsbasis
  • Packaging250mg
  • Price$37
  • Updated2026-05-28
  • Buy
  • Manufactureraablocks
  • Product numberAA001N19
  • Product descriptionN,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine ≥95%
  • Packaging1g
  • Price$66
  • Updated2026-05-28
  • Buy
  • Manufactureraablocks
  • Product numberAA001N19
  • Product descriptionN,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine (99.999%-Si)
  • Packaging5g
  • Price$130
  • Updated2026-05-28
  • Buy
  • Manufactureraablocks
  • Product numberAA001N19
  • Product descriptionN,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine (99.999%-Si)
  • Packaging25g
  • Price$296
  • Updated2026-05-28
  • Buy
  • ManufacturerAmerican Custom Chemicals Corporation
  • Product numberSDY0000511
  • Product descriptionTRIS(DIMETHYLAMINO)SILANE 95.00%
  • Packaging10G
  • Price$628
  • Updated2021-12-16
  • Buy
  • ManufacturerAmerican Custom Chemicals Corporation
  • Product numberSDY0000511
  • Product descriptionTRIS(DIMETHYLAMINO)SILANE 95.00%
  • Packaging25G
  • Price$1380.11
  • Updated2021-12-16
  • Buy
  • ManufacturerChem-Impex
  • Product number36339
  • Product descriptionN,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine ≥99%(GC)
  • Packaging25G
  • Price$247.2
  • Updated2026-05-19
  • Buy
  • ManufacturerSigma-Aldrich
  • Product number570133
  • Product descriptionTris(dimethylamino)silane electronic grade, 99.999%
  • Packaging25g
  • Price$235
  • Updated2026-04-30
  • Buy
  • ManufacturerSigma-Aldrich
  • Product number759562
  • Product descriptionTris(dimethylamino)silane packaged for use in deposition systems
  • Packaging25g
  • Price$1080
  • Updated2026-04-30
  • Buy
  • ManufacturerStrem Chemicals
  • Product number98-4035
  • Product descriptionTris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD (99.999%-Si)
  • Packaging25g
  • Price$1295
  • Updated2026-04-30
  • Buy
  • ManufacturerStrem Chemicals
  • Product number14-8750
  • Product descriptionTris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM (99.999%-Si)
  • Packaging25g
  • Price$217
  • Updated2026-04-30
  • Buy
  • ManufacturerStrem Chemicals
  • Product number14-8750
  • Product descriptionTris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM (99.999%-Si)
  • Packaging5g
  • Price$76
  • Updated2026-04-30
  • Buy
Manufacturer Product number Product description Packaging Price Updated Buy
aablocks AA001N19 N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine ≥99%,≥99.999%metalsbasis 250mg $37 2026-05-28 Buy
aablocks AA001N19 N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine ≥95% 1g $66 2026-05-28 Buy
aablocks AA001N19 N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine (99.999%-Si) 5g $130 2026-05-28 Buy
aablocks AA001N19 N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine (99.999%-Si) 25g $296 2026-05-28 Buy
American Custom Chemicals Corporation SDY0000511 TRIS(DIMETHYLAMINO)SILANE 95.00% 10G $628 2021-12-16 Buy
American Custom Chemicals Corporation SDY0000511 TRIS(DIMETHYLAMINO)SILANE 95.00% 25G $1380.11 2021-12-16 Buy
Chem-Impex 36339 N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine ≥99%(GC) 25G $247.2 2026-05-19 Buy
Sigma-Aldrich 570133 Tris(dimethylamino)silane electronic grade, 99.999% 25g $235 2026-04-30 Buy
Sigma-Aldrich 759562 Tris(dimethylamino)silane packaged for use in deposition systems 25g $1080 2026-04-30 Buy
Strem Chemicals 98-4035 Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok® cylinder (96-1070) for CVD/ALD (99.999%-Si) 25g $1295 2026-04-30 Buy
Strem Chemicals 14-8750 Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM (99.999%-Si) 25g $217 2026-04-30 Buy
Strem Chemicals 14-8750 Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM (99.999%-Si) 5g $76 2026-04-30 Buy

Properties

Melting point :<0°C
Boiling point :145 °C
Density :0,838 g/cm3
refractive index :1.4247
Flash point :25°C
storage temp. :2-8°C, protect from light
form :liquid
pka :10.93±0.70(Predicted)
Specific Gravity :0.84
color :colorless to light yellow
Sensitive :air sensitive, moisture sensitive
Hydrolytic Sensitivity :8: reacts rapidly with moisture, water, protic solvents
InChI :1S/C6H19N3Si/c1-7(2)10(8(3)4)9(5)6/h10H,1-6H3
InChIKey :TWVSWDVJBJKDAA-UHFFFAOYSA-N
SMILES :CN(C)[SiH](N(C)C)N(C)C
EPA Substance Registry System :N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7)

Safety Information

Symbol(GHS): Flame (GHS02)Corrosion (GHS05)Skull and Crossbones (GHS06)
Signal word: Danger
Hazard statements:
Code Hazard statements Hazard class Category Signal word Pictogram P-Codes
H225 Highly Flammable liquid and vapour Flammable liquids Category 2 Danger P210,P233, P240, P241, P242, P243,P280, P303+ P361+P353, P370+P378,P403+P235, P501
H261 In contact with water releases flammable gas Substances And Mixtures Which, In Contact With Water,Emit Flammable Gases Category 2
Category 3		 Danger
Warning		 P231+P232, P280, P370+P378,P402+P404, P501
H302 Harmful if swallowed Acute toxicity,oral Category 4 Warning P264, P270, P301+P312, P330, P501
H311 Toxic in contact with skin Acute toxicity,dermal Category 3 Danger P280, P302+P352, P312, P322, P361,P363, P405, P501
H314 Causes severe skin burns and eye damage Skin corrosion/irritation Category 1A, B, C Danger P260,P264, P280, P301+P330+ P331,P303+P361+P353, P363, P304+P340,P310, P321, P305+ P351+P338, P405,P501
H330 Fatal if inhaled Acute toxicity,inhalation Category 1, 2 Danger P260, P271, P284, P304+P340, P310,P320, P403+P233, P405, P501
Precautionary statements:
P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking.
P231+P232 Handle under inert gas. Protect from moisture.
P280 Wear protective gloves/protective clothing/eye protection/face protection.
P303+P361+P353 IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower.
P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.

Description

Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.

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Suppliers and manufacturers

Shanghai Boyle Chemical Co., Ltd. J & K SCIENTIFIC LTD. Meryer (Shanghai) Chemical Technology Co., Ltd. INTATRADE GmbH Beijing HwrkChemical Technology Co., Ltd Energy Chemical Shanghai Boc Chemical Co.,Ltd Shanghai Hanhong Scientific Co.,Ltd. Novel Chemical Shanghai Gileader Advanced Material Technology Co.,Ltd