TRI-T-BUTOXYSILANOL
- CAS No.
- 18166-43-3
- Chemical Name:
- TRI-T-BUTOXYSILANOL
- Synonyms
- NSC 243646;TRI-T-BUTOXYSILANOL;Tris(tert-butoxy)siL;TRIS(T-BUTOXY)SILANOL;Tri-tert-butoxysilanol;Tri-tert-butyl silicate;TRIS(TERT-BUTOXY)SILANOL;Tri(tert-butyloxy)silanol;Tri-t-butoxysilanol (99.9+%-Si);Tris(tert-butoxy)silanol
- CBNumber:
- CB4281971
- Molecular Formula:
- C12H28O4Si
- Molecular Weight:
- 264.43
- MDL Number:
- MFCD00271024
- MOL File:
- 18166-43-3.mol
- MSDS File:
- SDS
- TDS File:
- TDS
| Product description | Number | Pack Size | Price |
| Tris(tert-butoxy)silanol 99.999% | 553468 | 5g | $123 |
| Tris(tert-butoxy)silanol 99.999% | 553468 | 25g | $461 |
| Tri-t-butoxysilanol (99.999%-Si) PURATREM (99.999%-Si) | 14-7015 | 1g | $30 |
| Tri-t-butoxysilanol (99.999%-Si) PURATREM 14-7015 contained in 50 ml Swagelok® cylinder (96-1077) for CVD/ALD (99.999%-Si) | 98-6025 | 25g | $2069 |
| Tri-t-butoxysilanol (99.999%-Si) PURATREM (99.999%-Si) | 14-7015 | 5g | $90 |
| More product size | |||
| Melting point | 63-65 °C(lit.) |
|---|---|
| Boiling point | 205-210 °C(lit.) |
| Density | 0,92 g/cm3 |
| Flash point | >65°C |
| storage temp. | Inert atmosphere,Room Temperature |
| form | solid |
| pka | 11.78±0.53(Predicted) |
| Hydrolytic Sensitivity | 7: reacts slowly with moisture/water |
| Sensitive | moisture sensitive |
| InChI | 1S/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3 |
| InChIKey | HLDBBQREZCVBMA-UHFFFAOYSA-N |
| SMILES | CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C |
| UNSPSC Code | 12352103 |
| NACRES | NA.23 |
SAFETY
Risk and Safety Statements
| Symbol(GHS) | ![]() GHS07 |
|---|---|
| Signal word | Warning |
| Hazard statements | H335-H315-H319 |
| Precautionary statements | P264-P280-P305+P351+P338-P337+P313P-P264-P280-P302+P352-P321-P332+P313-P362 |
| PPE | Eyeshields, Gloves, type N95 (US) |
| Risk Statements | 36/37/38 |
| Safety Statements | 22-24/25 |
| WGK Germany | 3 |
| TSCA | No |
| Storage Class | 11 - Combustible Solids |
TRI-T-BUTOXYSILANOL price More Price(20)
| Manufacturer | Product number | Product description | CAS number | Packaging | Price | Updated | Buy |
|---|---|---|---|---|---|---|---|
| Sigma-Aldrich | 553468 | Tris(tert-butoxy)silanol 99.999% | 18166-43-3 | 5g | $123 | 2026-04-30 | Buy |
| Sigma-Aldrich | 553468 | Tris(tert-butoxy)silanol 99.999% | 18166-43-3 | 25g | $461 | 2026-04-30 | Buy |
| Strem Chemicals | 14-7015 | Tri-t-butoxysilanol (99.999%-Si) PURATREM (99.999%-Si) | 18166-43-3 | 1g | $30 | 2026-04-30 | Buy |
| Strem Chemicals | 98-6025 | Tri-t-butoxysilanol (99.999%-Si) PURATREM 14-7015 contained in 50 ml Swagelok® cylinder (96-1077) for CVD/ALD (99.999%-Si) | 18166-43-3 | 25g | $2069 | 2026-04-30 | Buy |
| Strem Chemicals | 14-7015 | Tri-t-butoxysilanol (99.999%-Si) PURATREM (99.999%-Si) | 18166-43-3 | 5g | $90 | 2026-04-30 | Buy |
TRI-T-BUTOXYSILANOL Chemical Properties,Uses,Production
Uses
Silicon oxide source for rapid atomic layer deposition to prepare various nanolaminates.
Uses
Uses
Tris(tert-alkoxy)silanols reacts with tetrakis(dimethylamino)-hafnium vapor(Hf(N(CH3)2)4) for vapor phase deposition of hafnium silicate glass films. Tris(tert-butoxy)silanol is used for atomic layer deposition (ALD) of highly conformal layers of amorphous silicon dioxide and aluminum oxide nanolaminates.
General Description
Tris(tert-butoxy)silanol can react with various metal alkyl amides to act as precursors for vapor deposition metal silicates. It also acts as a suitable precursor for deposition of silica.
TRI-T-BUTOXYSILANOL Preparation Products And Raw materials
Raw materials
1of2
Preparation Products
| Supplier | Tel | Country | ProdList | Advantage | |
|---|---|---|---|---|---|
| Shanghai Daken Advanced Materials Co.,Ltd | +86-2158073036 | info@dakenam.com | China | 14026 | 58 |
| ATK CHEMICAL COMPANY LIMITED | +undefined-21-51877795 | ivan@atkchemical.com | China | 33024 | 60 |
| career henan chemical co | +86-0371-86658258 | sales@coreychem.com | China | 29812 | 58 |
| Win-Win Chemical CO., Limited | 0086-577-64498589 | sales@win-winchemical.com | CHINA | 998 | 58 |
| Antai Fine Chemical Technology Co.,Limited | 18503026267 | info@antaichem.com | CHINA | 9636 | 58 |
| Hefei TNJ Chemical Industry Co.,Ltd. | +86-0551-65418671 +86-189 4982 3763 | sales@tnjchem.com | China | 34563 | 58 |
| Win-Win chemical CO., Limited | +86-0086-577-64498589 +86-15355981851 | sales@win-winchemical.com | China | 14303 | 58 |
| Hunan russell chemicals technology co ltd | 731-88557738 13739093081 | sales01@russellchem.com | CHINA | 291 | 58 |
| Dayang Chem (Hangzhou) Co.,Ltd. | +86-0571-88938639 17705817739 | info@dycnchem.com | China | 52704 | 58 |
| Alfa Chemistry | +1-5166625404; | Info@alfa-chemistry.com | United States | 20000 | 58 |
View Lastest Price from TRI-T-BUTOXYSILANOL manufacturers
| Image | Update time | Product | Price | Min. Order | Purity | Supply Ability | Manufacturer | |
|---|---|---|---|---|---|---|---|---|
![]() |
2019-07-06 | TRI-T-BUTOXYSILANOL
18166-43-3
|
$2.00 | 1KG | 99% | Career Henan Chemical Co |
-

- TRI-T-BUTOXYSILANOL
18166-43-3
- $2.00
- 99%
- Career Henan Chemical Co







