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TRI-T-BUTOXYSILANOL

CAS No.
18166-43-3
Chemical Name:
TRI-T-BUTOXYSILANOL
Synonyms
NSC 243646;TRI-T-BUTOXYSILANOL;Tris(tert-butoxy)siL;TRIS(T-BUTOXY)SILANOL;Tri-tert-butoxysilanol;Tri-tert-butyl silicate;TRIS(TERT-BUTOXY)SILANOL;Tri(tert-butyloxy)silanol;Tri-t-butoxysilanol (99.9+%-Si);Tris(tert-butoxy)silanol
CBNumber:
CB4281971
Molecular Formula:
C12H28O4Si
Molecular Weight:
264.43
MDL Number:
MFCD00271024
MOL File:
18166-43-3.mol
MSDS File:
SDS
Last updated:2026-01-13 11:21:02
Product description Number Pack Size Price
Tris(tert-butoxy)silanol 99.999% 553468 5g $109.25
Tris(tert-butoxy)silanol 99.999% 553468 25g $411.35
Tri-t-butoxysilanol (99.999%-Si) PURATREM 14-7015 1g $30
Tri-t-butoxysilanol (99.999%-Si) PURATREM 14-7015 5g $90
Tris(tert-butoxy)silanol packaged for use in deposition systems 697281 25g $1380
More product size

TRI-T-BUTOXYSILANOL Properties

Melting point 63-65 °C(lit.)
Boiling point 205-210 °C(lit.)
Density 0,92 g/cm3
Flash point >65°C
storage temp. Inert atmosphere,Room Temperature
pka 11.78±0.53(Predicted)
form solid
Hydrolytic Sensitivity 7: reacts slowly with moisture/water
Sensitive moisture sensitive
InChI 1S/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3
InChIKey HLDBBQREZCVBMA-UHFFFAOYSA-N
SMILES CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C
UNSPSC Code 12352103
NACRES NA.23

SAFETY

Risk and Safety Statements

Symbol(GHS)  GHS hazard pictograms
GHS07
Signal word  Warning
Hazard statements  H335-H315-H319
Precautionary statements  P264-P280-P305+P351+P338-P337+P313P-P264-P280-P302+P352-P321-P332+P313-P362
PPE Eyeshields, Gloves, type N95 (US)
Risk Statements  36/37/38
Safety Statements  22-24/25
WGK Germany  3
TSCA  No
Storage Class 11 - Combustible Solids

TRI-T-BUTOXYSILANOL price More Price(13)

Manufacturer Product number Product description CAS number Packaging Price Updated Buy
Sigma-Aldrich 553468 Tris(tert-butoxy)silanol 99.999% 18166-43-3 5g $109.25 2025-07-31 Buy
Sigma-Aldrich 553468 Tris(tert-butoxy)silanol 99.999% 18166-43-3 25g $411.35 2025-07-31 Buy
Strem Chemicals 14-7015 Tri-t-butoxysilanol (99.999%-Si) PURATREM 18166-43-3 1g $30 2024-03-01 Buy
Strem Chemicals 14-7015 Tri-t-butoxysilanol (99.999%-Si) PURATREM 18166-43-3 5g $90 2024-03-01 Buy
Sigma-Aldrich 697281 Tris(tert-butoxy)silanol packaged for use in deposition systems 18166-43-3 25g $1380 2023-06-20 Buy
Product number Packaging Price Buy
553468 5g $109.25 Buy
553468 25g $411.35 Buy
14-7015 1g $30 Buy
14-7015 5g $90 Buy
697281 25g $1380 Buy

TRI-T-BUTOXYSILANOL Chemical Properties,Uses,Production

Uses

Silicon oxide source for rapid atomic layer deposition to prepare various nanolaminates.

Uses

Precursors Packaged for Depositions Systems

Uses

Tris(tert-alkoxy)silanols reacts with tetrakis(dimethylamino)-hafnium vapor(Hf(N(CH3)2)4) for vapor phase deposition of hafnium silicate glass films. Tris(tert-butoxy)silanol is used for atomic layer deposition (ALD) of highly conformal layers of amorphous silicon dioxide and aluminum oxide nanolaminates.

General Description

Tris(tert-butoxy)silanol can react with various metal alkyl amides to act as precursors for vapor deposition metal silicates. It also acts as a suitable precursor for deposition of silica.

18395-80-7
18166-43-3
Synthesis of TRI-T-BUTOXYSILANOL from Di-tert-butoxydichlorosilane.

TRI-T-BUTOXYSILANOL Preparation Products And Raw materials

Global( 69)Suppliers
Supplier Tel Email Country ProdList Advantage
Shanghai Daken Advanced Materials Co.,Ltd
+86-2158073036 info@dakenam.com China 13620 58
ATK CHEMICAL COMPANY LIMITED
+undefined-21-51877795 ivan@atkchemical.com China 33024 60
career henan chemical co
+86-0371-86658258 +8613203830695 sales@coreychem.com China 29833 58
Win-Win Chemical CO., Limited
0086-577-64498589 sales@win-winchemical.com CHINA 998 58
Antai Fine Chemical Technology Co.,Limited
18503026267 info@antaichem.com CHINA 9636 58
Hefei TNJ Chemical Industry Co.,Ltd.
+86-0551-65418671 +8618949823763 sales@tnjchem.com China 34563 58
Win-Win chemical CO., Limited
+86-0086-577-64498589 +86-15355981851 sales@win-winchemical.com China 14343 58
Hunan russell chemicals technology co ltd
731-88557738 +8613739093081 sales01@russellchem.com CHINA 291 58
Dayang Chem (Hangzhou) Co.,Ltd.
+86-0571-88938639 +8617705817739 info@dycnchem.com China 52846 58
Hangzhou MolCore BioPharmatech Co.,Ltd.
+86-057181025280; +8617767106207 sales@molcore.com China 49734 58

View Lastest Price from TRI-T-BUTOXYSILANOL manufacturers

Image Update time Product Price Min. Order Purity Supply Ability Manufacturer
TRI-T-BUTOXYSILANOL pictures 2019-07-06 TRI-T-BUTOXYSILANOL
18166-43-3
US $2.00 / KG 1KG 99% customsie Career Henan Chemical Co

TRI-T-BUTOXYSILANOL Spectrum

TRI-T-BUTOXYSILANOL TRIS(TERT-BUTOXY)SILANOL TRIS(T-BUTOXY)SILANOL Tri-tert-butoxysilanol Tri-t-butoxysilanol (99.9+%-Si) Tri-t-butoxysilanol (99.999%-Si) PURATREM 14-7015 contained in 50 ml Swagelok(R) cylinder (96-1077) for CVD/ALD hydroxy-tris[(2-methylpropan-2-yl)oxy]silane Tri-t-butoxysilanol PURATREM 14-7015 contained in 50 Ml Swagelokcylinder (96-1077) for CVD/ALD Tri-tert-butyl hydrogen orthosilicate Tri-t-butoxysilanol (99.999%-Si) PURATREM Tri-t-butoxysilanol (99.999%-Si) PURATREM 14-7015 contained in 50 Ml Swagelokcylinder (96-1077) for CVD/ALD Tris(tert-butoxy)silanol 99.999% Tri-tert-butyl silicate Tri(tert-butyloxy)silanol NSC 243646 Silicic acid, tris(1,1-diMethylethyl) ester Tris(tert-butoxy)siL Silicic acid (H4SiO4), tris(1,1-dimethylethyl) ester Tris(tert-butoxy)silanol 100.00% Tris(2-methyl-2-propanyl) hydrogen orthosilicate Tris(tert-butoxy)silanol 18166-43-3 CH33CO3SiOH Micro/Nanoelectronics Organosilicon Precursors by Metal Precursors Packaged for Deposition SystemsOrganometallic Reagents SilanolsVapor Deposition Precursors Vapor Deposition Precursors 14: Silicon Chemical Synthesis CVD and ALD Precursors by Metal CVD and ALD Precursors Packaged for Deposition Systems Materials Science Organometallic Reagents Silanols Silicon Vapor Deposition Precursors Silanes Solution Deposition Precursors