ChemicalBook >> CAS DataBase List >>Tri-t-butoxysilanol
Tri-t-butoxysilanol
- CAS No.
- 18166-43-3
- Chemical Name:
- Tri-t-butoxysilanol
- Synonyms
- NSC 243646;Tri-t-butoxysilanol;Tris(tert-butoxy)siL;TRIS(T-BUTOXY)SILANOL;Tri-tert-butoxysilanol;Tri-tert-butyl silicate;TRIS(TERT-BUTOXY)SILANOL;Tri(tert-butyloxy)silanol;Tris(tert-butoxy)silanol(TBS);Tri-t-butoxysilanol (99.9+%-Si)
- CBNumber:
- CB4281971
- Molecular Formula:
- C12H28O4Si
- Molecular Weight:
- 264.43
- MDL Number:
- MFCD00271024
- MOL File:
- 18166-43-3.mol
- MSDS File:
- SDS
- TDS File:
- TDS
Last updated:2026-09-12 18:52:43
| Melting point | 63-65 °C(lit.) |
|---|---|
| Boiling point | 205-210 °C(lit.) |
| Density | 0,92 g/cm3 |
| Flash point | >65°C |
| storage temp. | Inert atmosphere,Room Temperature |
| form | solid |
| pka | 11.78±0.53(Predicted) |
| Hydrolytic Sensitivity | 7: reacts slowly with moisture/water |
| Sensitive | moisture sensitive |
| InChI | 1S/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3 |
| InChIKey | HLDBBQREZCVBMA-UHFFFAOYSA-N |
| SMILES | CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C |
| UNSPSC Code | 12352103 |
| NACRES | NA.23 |
SAFETY
Risk and Safety Statements
| Symbol(GHS) |  GHS07 |
|---|---|
| Signal word | Warning |
| Hazard statements | H335-H315-H319 |
| Precautionary statements | P264-P280-P305+P351+P338-P337+P313P-P264-P280-P302+P352-P321-P332+P313-P362 |
| PPE | Eyeshields, Gloves, type N95 (US) |
| Risk Statements | 36/37/38 |
| Safety Statements | 22-24/25 |
| WGK Germany | 3 |
| TSCA | No |
| Storage Class | 11 - Combustible Solids |
Tri-t-butoxysilanol price More Price(15)
| Manufacturer | Product number | Product description | CAS number | Packaging | Price | Updated | Buy |
|---|---|---|---|---|---|---|---|
| Sigma-Aldrich | 553468 | Tris(tert-butoxy)silanol 99.999% | 18166-43-3 | 5g | $123 | 2026-04-30 | Buy |
| Sigma-Aldrich | 553468 | Tris(tert-butoxy)silanol 99.999% | 18166-43-3 | 25g | $461 | 2026-04-30 | Buy |
| Strem Chemicals | 14-7015 | Tri-t-butoxysilanol (99.999%-Si) PURATREM (99.999%-Si) | 18166-43-3 | 1g | $30 | 2026-04-30 | Buy |
| Strem Chemicals | 98-6025 | Tri-t-butoxysilanol (99.999%-Si) PURATREM 14-7015 contained in 50 ml Swagelok® cylinder (96-1077) for CVD/ALD (99.999%-Si) | 18166-43-3 | 25g | $2069 | 2026-04-30 | Buy |
| Strem Chemicals | 14-7015 | Tri-t-butoxysilanol (99.999%-Si) PURATREM (99.999%-Si) | 18166-43-3 | 5g | $90 | 2026-04-30 | Buy |
Tri-t-butoxysilanol Chemical Properties, Uses, Production
Uses
Silicon oxide source for rapid atomic layer deposition to prepare various nanolaminates.
Uses
Uses
Tris(tert-alkoxy)silanols reacts with tetrakis(dimethylamino)-hafnium vapor(Hf(N(CH3)2)4) for vapor phase deposition of hafnium silicate glass films. Tris(tert-butoxy)silanol is used for atomic layer deposition (ALD) of highly conformal layers of amorphous silicon dioxide and aluminum oxide nanolaminates.
General Description
Tris(tert-butoxy)silanol can react with various metal alkyl amides to act as precursors for vapor deposition metal silicates. It also acts as a suitable precursor for deposition of silica.
Tri-t-butoxysilanol Preparation Products And Raw materials
Raw materials
1of2
Preparation Products
Global Suppliers ( 67)
| Supplier | Tel | Country | ProdList | Advantage | |
|---|---|---|---|---|---|
| J & K SCIENTIFIC LTD. | 18210857532 18210857532 | jkinfo@jkchemical.com | China | 96815 | 76 |
| Meryer (Shanghai) Chemical Technology Co., Ltd. | 4006356688 18621169109 | market03@meryer.com | China | 40202 | 62 |
| Beijing HwrkChemical Technology Co., Ltd | 89508211 18501085097 | sales.bj@hwrkchemical.com | China | 9407 | 55 |
| Shanghai Hanhong Scientific Co.,Ltd. | 021-54306202 13764082696 | info@hanhongsci.com | China | 42917 | 64 |
| Novel Chemical | +86-21-64855560, 4008207808 | sales@novelglobal.com | China | 124 | 62 |
| Aemon Chemical | 0086-755-86198205 | acinfo@aemonchem.com | China | 1928 | 57 |
| Hangzhou Sage Chemical Co., Ltd. | +86057186818502 13588463833 | info@sagechem.com | China | 10265 | 58 |
| Shanghai Worldyang Chemical Co.,Ltd. | 021-56795766 | sales@worldyachem.com | China | 9475 | 58 |
| Sigma-Aldrich | 021-61415566 800-8193336 | orderCN@merckgroup.com | China | 51389 | 80 |
| Infinity SCI | 400-106-2016 17800804092 | admin@infsci.com | China | 471 | 55 |
View Latest Price from Tri-t-butoxysilanol manufacturers
| Image | Update time | Product | Price | Min. Order | Purity | Supply Ability | Manufacturer | |
|---|---|---|---|---|---|---|---|---|
 |
2019-07-06 | TRI-T-BUTOXYSILANOL
18166-43-3
|
$2.00 | 1KG | 99% | Career Henan Chemical Co |
-
- TRI-T-BUTOXYSILANOL
18166-43-3
- $2.00
- 99%
- Career Henan Chemical Co
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18166-43-3
CH33CO3SiOH
Micro/Nanoelectronics
Organosilicon
Precursors by Metal
Precursors Packaged for Deposition SystemsOrganometallic Reagents
SilanolsVapor Deposition Precursors
Vapor Deposition Precursors
14: Silicon
Chemical Synthesis
CVD and ALD Precursors by Metal
CVD and ALD Precursors Packaged for Deposition Systems
Materials Science
Organometallic Reagents
Silanols
Silicon
Vapor Deposition Precursors
Silanes
Solution Deposition Precursors
